Figure 5
From: Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam
Capacitance-voltage characteristics under different plates distance conditions of cantilever beam A at frequency of (a) 50 KHz, (b) 100 KHz, (c) 1 MHz and cantilever beam B at frequency of (d) 50 KHz, (e) 100 KHz, (f) 1 MHz.
