Figure 1 | Scientific Reports

Figure 1

From: Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements

Figure 1

Thermocouple fabrication stages and patterns of electrodes at different magnifications. Thermocouples were fabricated on glass and Si3N4 membranes of different thicknesses: 1 μm and 30 nm. (a) Metal junctions of 2.5-μm-wide metal stripes with 100 × 100 μm2 primary contact pads. (b) Photo image of a laser ablated photolithography mask used for resist exposure. It defines the secondary contact pads to interface with electrical measurements. (c) Photo of the final device on glass. (d) A SEM image of the micro-thermocouple and reference electrodes. The central pair is the Au-Ni thermocouple.

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