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Electrically tunable VO2–metal metasurface for mid-infrared switching, limiting and nonlinear isolation

Abstract

We demonstrate an electrically controlled vanadium dioxide (VO2)–metal metasurface for the mid-wave infrared regime that simultaneously functions as a tunable optical switch, an optical limiter with a tunable limiting threshold and a nonlinear optical isolator with a tunable operating range. The tunability is achieved via Joule heating through the metal comprising the metasurface, resulting in an integrated optoelectronic device. As an optical switch, the device has an experimental transmission ratio of ~100 when varying the bias current. Operating as an optical limiter, we demonstrated the tunability of the limiting threshold from 20 to 180 mW of incident laser power. Similar degrees of tunability are also achieved for nonlinear optical isolation, which enables asymmetric (non-reciprocal) transmission.

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Fig. 1: Design of our multifunctional device that can serve as an optical switch, limiter and isolator.
Fig. 2: Characterization of the optical switching function of our fabricated device.
Fig. 3: Characterization of the optical limiting function of our fabricated device.
Fig. 4: Characterization of the optical isolation function of our fabricated device.

Data availability

The data that support the plots within this paper are available via Figshare at https://doi.org/10.6084/m9.figshare.24093792.v1 (ref. 49), or from the corresponding author upon reasonable request.

Code availability

Files for the COMSOL and Lumerical models used in our Article are available via Figshare at https://doi.org/10.6084/m9.figshare.24093792.v1 (ref. 49), or from the corresponding author upon reasonable request.

References

  1. Wan, C. et al. On the optical properties of thin‐film vanadium dioxide from the visible to the far infrared. Ann. Phys. 531, 1900188 (2019).

    Google Scholar 

  2. Guo, Y., Xiong, B., Shuai, Y. & Zhao, J. Thermal driven wavelength-selective optical switch based on magnetic polaritons coupling. J. Quant. Spectrosc. Radiat. Transf. 255, 107230 (2020).

    Google Scholar 

  3. Qi, J. et al. Independent regulation of electrical properties of VO2 for low threshold voltage electro-optic switch applications. Sens. Actuators Phys. 335, 113394 (2022).

    Google Scholar 

  4. Guo, Y. et al. Dual-band polarized optical switch with opposite thermochromic properties to vanadium dioxide. Appl. Phys. Lett. 121, 201102 (2022).

    ADS  Google Scholar 

  5. Li, Z. et al. Ultrahigh infrared photoresponse from core-shell single-domain-VO2/V2O5 heterostructure in nanobeam. Adv. Funct. Mater. 24, 1821–1830 (2014).

    ADS  Google Scholar 

  6. Cui, Y. et al. Thermochromic VO2 for energy-efficient smart windows. Joule 2, 1707–1746 (2018).

    Google Scholar 

  7. Zhang, W.-W., Qi, H., Sun, A.-T., Ren, Y.-T. & Shi, J.-W. Periodic trapezoidal VO2-Ge multilayer absorber for dynamic radiative cooling. Opt. Express 28, 20609–20623 (2020).

    Google Scholar 

  8. Ono, M., Chen, K., Li, W. & Fan, S. Self-adaptive radiative cooling based on phase change materials. Opt. Express 26, A777–A787 (2018).

    Google Scholar 

  9. Taylor, S. et al. Spectrally-selective vanadium dioxide based tunable metafilm emitter for dynamic radiative cooling. Sol. Energy Mater. Sol. Cells 217, 110739 (2020).

    Google Scholar 

  10. Kats, M. A. et al. Vanadium dioxide as a natural disordered metamaterial: perfect thermal emission and large broadband negative differential thermal emittance. Phys. Rev. X 3, 041004 (2014).

    Google Scholar 

  11. Chandra, S., Franklin, D., Cozart, J., Safaei, A. & Chanda, D. Adaptive multispectral infrared camouflage. ACS Photonics 5, 4513–4519 (2018).

    Google Scholar 

  12. Jung, Y. et al. Integrated hybrid VO2–silicon optical memory. ACS Photonics 9, 217–223 (2022).

    Google Scholar 

  13. Driscoll, T. et al. Memory metamaterials. Science 325, 1518–1521 (2009).

    ADS  Google Scholar 

  14. Ren, Z. et al. Active and smart terahertz electro-optic modulator based on VO2 structure. ACS Appl. Mater. Interfaces 14, 26923–26930 (2022).

    Google Scholar 

  15. Tripathi, A. et al. Tunable Mie-resonant dielectric metasurfaces based on VO2 phase-transition materials. ACS Photonics 8, 1206–1213 (2021).

    Google Scholar 

  16. Kang, T. et al. Mid-infrared active metasurface based on Si/VO2 hybrid meta-atoms. Photon. Res. 10, 373–380 (2022).

    Google Scholar 

  17. Maaza, M. et al. Optical limiting in pulsed laser deposited VO2 nanostructures. Opt. Commun. 285, 1190–1193 (2012).

    ADS  Google Scholar 

  18. Howes, A. et al. Optical limiting based on Huygens’ metasurfaces. Nano Lett. 20, 4638–4644 (2020).

    ADS  Google Scholar 

  19. Tognazzi, A. et al. Opto-thermal dynamics of thin-film optical limiters based on the VO2 phase transition. Opt. Mater. Express 13, 41–52 (2022).

    ADS  Google Scholar 

  20. Guan, H. et al. Ultra-high transmission broadband tunable VO2 optical limiter. Laser Photonics Rev. 17, 2200653 (2023).

    ADS  Google Scholar 

  21. Parra, J. et al. Low-threshold power and tunable integrated optical limiter based on an ultracompact VO2/Si waveguide. APL Photonics 6, 121301 (2021).

    ADS  Google Scholar 

  22. Wan, C. et al. Ultrathin broadband reflective optical limiter. Laser Photonics Rev. 15, 2100001 (2021).

    ADS  Google Scholar 

  23. Wan, C. et al. Limiting optical diodes enabled by the phase transition of vanadium dioxide. ACS Photonics 5, 2688–2692 (2018).

    Google Scholar 

  24. Tripathi, A. et al. Nanoscale optical nonreciprocity with nonlinear metasurfaces. Preprint at arXiv https://doi.org/10.48550/arXiv.2210.14952 (2023).

  25. Béteille, F. & Livage, J. Optical switching in VO2 thin films. J. Sol-Gel Sci. Technol. 13, 915–921 (1998).

    Google Scholar 

  26. Kim, H. T. et al. Mechanism and observation of Mott transition in VO2-based two- and three-terminal devices. New J. Phys. 6, 52 (2004).

    ADS  Google Scholar 

  27. Li, D. et al. Joule heating-induced metal-insulator transition in epitaxial VO2/TiO2 devices. ACS Appl. Mater. Interfaces 8, 12908–12914 (2016).

    ADS  Google Scholar 

  28. Zimmers, A. et al. Role of thermal heating on the voltage induced insulator-metal transition in VO2. Phys. Rev. Lett. 110, 056601 (2013).

    ADS  Google Scholar 

  29. Murtagh, O., Walls, B. & Shvets, I. V. Controlling the resistive switching hysteresis in VO2 thin films via application of pulsed voltage. Appl. Phys. Lett. 117, 063501 (2020).

    ADS  Google Scholar 

  30. Kischkat, J. et al. Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride. Appl. Opt. 51, 6789–6798 (2012).

    ADS  Google Scholar 

  31. Kim, H., Charipar, N. A., Figueroa, J., Bingham, N. S. & Piqué, A. Control of metal-insulator transition temperature in VO2 thin films grown on RuO2/TiO2 templates by strain modification. AIP Adv. 9, 015302 (2019).

    ADS  Google Scholar 

  32. Lide, D. R. et al. CRC Handbook of Chemistry and Physics (CRC Press, 2004).

  33. Yannopoulos, J. C. The Extractive Metallurgy of Gold (Springer, 1991).

  34. Brahlek, M. et al. Opportunities in vanadium-based strongly correlated electron systems. MRS Commun. 7, 27–52 (2017).

    Google Scholar 

  35. Lee, S., Hippalgaonkar, K., Yang, F. & Hong, J. Anomalously low electronic thermal conductivity in metallic vanadium dioxide. Science 355, 371–374 (2017).

    ADS  Google Scholar 

  36. Goodfellow. Titanium dioxide—titania (TiO2). AZoM https://www.azom.com/article.aspx?ArticleID=1179 (2019).

  37. Klimov, V. A. et al. Hysteresis loop construction for the metal-semiconductor phase transition in vanadium dioxide films. Tech. Phys. 47, 1134–1139 (2002).

    Google Scholar 

  38. Hwang, I. H., Park, C. I., Yeo, S., Sun, C. J. & Han, S. W. Decoupling the metal insulator transition and crystal field effects of VO2. Sci. Rep. 11, 3135 (2021).

    ADS  Google Scholar 

  39. Van Stryland, E. W., Wu, Y. Y., Hagan, D. J., Soileau, M. J. & Mansour, K. Optical limiting with semiconductors. J. Opt. Soc. Am. B 5, 1980–1988 (1988).

    Google Scholar 

  40. Sarangan, A., Ariyawansa, G., Vitebskiy, I. & Anisimov, I. Optical switching performance of thermally oxidized vanadium dioxide with an integrated thin film heater. Opt. Mater. Express 11, 2348 (2021).

    ADS  Google Scholar 

  41. Kittlaus, E. A., Weigel, P. O. & Jones, W. M. Low-loss nonlinear optical isolators in silicon. Nat. Photon. 14, 338–339 (2020).

    ADS  Google Scholar 

  42. Shi, Y., Yu, Z. & Fan, S. Limitations of nonlinear optical isolators due to dynamic reciprocity. Nat. Photon. 9, 388–392 (2015).

    ADS  Google Scholar 

  43. Lee, D. et al. Sharpened VO2 phase transition via controlled release of epitaxial strain. Nano Lett. 17, 5614–5619 (2017).

    ADS  Google Scholar 

  44. Manning, T. D., Parkin, I. P., Pemble, M. E., Sheel, D. & Vernardou, D. Intelligent window coatings: atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide. Chem. Mater. 16, 744–749 (2004).

    Google Scholar 

  45. Rensberg, J. et al. Active optical metasurfaces based on defect-engineered phase-transition materials. Nano Lett. 16, 1050–1055 (2016).

    ADS  Google Scholar 

  46. Catalano, S. et al. Rare-earth nickelates RNiO3: thin films and heterostructures. Rep. Progr. Phys. 81, 046501 (2018).

    ADS  MathSciNet  Google Scholar 

  47. Shahsafi, A. et al. Temperature-independent thermal radiation. Proc. Natl Acad. Sci. USA 116, 26402–26406 (2019).

    ADS  Google Scholar 

  48. King, J. L. et al. Wavelength-by-wavelength temperature-independent thermal radiation utilizing an insulator-metal transition. ACS Photonics 9, 2742–2747 (2022).

    Google Scholar 

  49. King, J. Figure data and model files for VO2-metal metasurface modulator. Figshare https://doi.org/10.6084/m9.figshare.24093792.v1 (2023).

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Acknowledgements

We acknowledge funding support from The Office of Naval Research (N00014-20-1-2297, received by M.A.K.) and from the Air Force Office of Scientific Research (FA9550-18-1-0250, received by S.R.).

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Contributions

M.A.K. and C.W. conceived the project, with M.A.K. providing the overall supervision. C.W. led the device design and optimization with input from J.K. The VO2 films were synthesized by T.J.P. and Z.Z., and supervised by S.R. C.W. and J.K. performed the remaining fabrication processes. The experimental setup and characterization were undertaken by C.W., J.K. and S.D. The photothermal simulations were conducted by C.W. and J.K. The data analysis was led by C.W., J.K. and M.A.K., with contributions from all co-authors. The manuscript was principally written by J.K., C.W. and M.A.K., with contributions from all co-authors.

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Correspondence to Mikhail A. Kats.

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Nature Photonics thanks Said R. K. Rodriguez and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.

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Supplementary Sections 1–9 and Figs. 1–12.

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King, J., Wan, C., Park, T.J. et al. Electrically tunable VO2–metal metasurface for mid-infrared switching, limiting and nonlinear isolation. Nat. Photon. 18, 74–80 (2024). https://doi.org/10.1038/s41566-023-01324-8

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