Ultrahigh-resolution thermometry is critical for future advances in bio-calorimetry1,2, sensitive bolometry for sensing3 and imaging4, as well as for probing dissipation in a range of electronic5, optoelectronic6 and quantum devices7. In spite of recent advances in the field8,9,10,11, achieving high-resolution measurements from microscale devices at room temperature remains an outstanding challenge. Here, we present a band-edge microthermometer that achieves this goal by relying on the strong, temperature-dependent optical properties of GaAs at its absorption edge12,13,14. Specifically, using a suspended asymmetric Fabry–Pérot resonator and a wavelength-stabilized probe laser we demonstrate a thermoreflectance coefficient of >30 K−1, enabling measurements with a thermometry noise floor of ~60 nK Hz−1/2 and a temperature resolution of <100 nK in a bandwidth of 0.1 Hz. The advances presented here are expected to enable a broad range of studies and applications in calorimetry and bolometry where miniaturized high-resolution thermometers are required.
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The custom scattering-matrix code used in this paper is available from the corresponding authors upon reasonable request.
Hong, S. et al. Sub-nanowatt microfluidic single-cell calorimetry. Nat. Commun. 11, 2982 (2020).
Hur, S., Mittapally, R., Yadlapalli, S., Reddy, P. & Meyhofer, E. Sub-nanowatt resolution direct calorimetry for probing real-time metabolic activity of individual C. elegans worms. Nat. Commun. 11, 2983 (2020).
Lee, G.-H. et al. Graphene-based Josephson junction microwave bolometer. Nature 586, 42–46 (2020).
Sengupta, K., Nagatsuma, T. & Mittleman, D. M. Terahertz integrated electronic and hybrid electronic–photonic systems. Nat. Electron. 1, 622–635 (2018).
Menges, F. et al. Temperature mapping of operating nanoscale devices by scanning probe thermometry. Nat. Commun. 7, 10874 (2016).
Luo, K., Herrick, R., Majumdar, A. & Petroff, P. Scanning thermal microscopy of a vertical-cavity surface-emitting laser. Appl. Phys. Lett. 71, 1604–1606 (1997).
Halbertal, D. et al. Nanoscale thermal imaging of dissipation in quantum systems. Nature 539, 407–410 (2016).
Weng, W. et al. Nano-Kelvin thermometry and temperature control: beyond the thermal noise limit. Phys. Rev. Lett. 112, 160801 (2014).
Strekalov, D., Thompson, R., Baumgartel, L., Grudinin, I. & Yu, N. Temperature measurement and stabilization in a birefringent whispering gallery mode resonator. Opt. Express 19, 14495–14501 (2011).
Tan, S., Wang, S., Saraf, S. & Lipa, J. A. Pico-Kelvin thermometry and temperature stabilization using a resonant optical cavity. Opt. Express 25, 3578–3593 (2017).
Loh, W., Yegnanarayanan, S., O’Donnell, F. & Juodawlkis, P. W. Ultra-narrow linewidth Brillouin laser with nanokelvin temperature self-referencing. Optica 6, 152–159 (2019).
Wei, J., Murray, J. M., Barnes, J., Gonzalez, L. P. & Guha, S. Determination of the temperature dependence of the band gap energy of semiconductors from transmission spectra. J. Electron. Mater. 41, 2857–2866 (2012).
Johnson, S. & Tiedje, T. Temperature dependence of the Urbach edge in GaAs. J. Appl. Phys. 78, 5609–5613 (1995).
Marple, D. Refractive index of GaAs. J. Appl. Phys. 35, 1241–1242 (1964).
Vendelbo, S. et al. Visualization of oscillatory behaviour of Pt nanoparticles catalysing CO oxidation. Nat. Mater. 13, 884–890 (2014).
Reihani, A., Lim, J. W., Fork, D. K., Meyhofer, E. & Reddy, P. Microwatt-resolution calorimeter for studying the reaction thermodynamics of nanomaterials at high temperature and pressure. ACS Sens. 6, 387–398 (2021).
Li, D. et al. Thermal conductivity of individual silicon nanowires. Appl. Phys. Lett. 83, 2934–2936 (2003).
Seol, J. H. et al. Two-dimensional phonon transport in supported graphene. Science 328, 213–216 (2010).
Sadat, S., Meyhofer, E. & Reddy, P. High resolution resistive thermometry for micro/nanoscale measurements. Rev. Sci. Instrum. 83, 084902 (2012).
Kucsko, G. et al. Nanometre-scale thermometry in a living cell. Nature 500, 54–58 (2013).
Neumann, P. et al. High-precision nanoscale temperature sensing using single defects in diamond. Nano Lett. 13, 2738–2742 (2013).
Jarzyna, M. & Zwierz, M. Quantum interferometric measurements of temperature. Phys. Rev. A 92, 032112 (2015).
Luerssen, D., Hudgings, J. A., Mayer, P. M. & Ram, R. J. Nanoscale thermoreflectance with 10mK temperature resolution using stochastic resonance. In Proc. Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium 253–258 (IEEE, 2005).
Cahill, D. G., Goodson, K. & Majumdar, A. Thermometry and thermal transport in micro/nanoscale solid-state devices and structures. J. Heat Transfer 124, 223–241 (2002).
Whittaker, D. & Culshaw, I. Scattering-matrix treatment of patterned multilayer photonic structures. Phys. Rev. B 60, 2610–2618 (1999).
Johnson, P. B. & Christy, R.-W. Optical constants of the noble metals. Phys. Rev. B 6, 4370–4379 (1972).
Lautenschlager, P., Garriga, M., Logothetidis, S. & Cardona, M. Interband critical points of GaAs and their temperature dependence. Phys. Rev. B 35, 9174–9189 (1987).
Schaefer, S., Gao, S., Webster, P., Kosireddy, R. & Johnson, S. Absorption edge characteristics of GaAs, GaSb, InAs, and InSb. J. Appl. Phys. 127, 165705 (2020).
Åström, K. J. & Murray, R. M. Feedback Systems (Princeton Univ. Press, 2010).
Qian, W. et al. High-sensitivity temperature sensor based on an alcohol-filled photonic crystal fiber loop mirror. Opt. Lett. 36, 1548–1550 (2011).
Festa, C. Thermostat with ±0.5 μK monitoring sensitivity. J. Phys. E 16, 683–686 (1983).
David, R. & Hunter, I. W. A liquid-in-glass thermometer read by an interferometer. Sens. Actuators A 121, 31–34 (2005).
Benson, B. B. & Krause, D. Jr Use of the quartz crystal thermometer for absolute temperature measurements. Rev. Sci. Instrum. 45, 1499–1501 (1974).
Sadat, S. et al. Room temperature picowatt-resolution calorimetry. Appl. Phys. Lett. 99, 043106 (2011).
We acknowledge support from DOE-BES through a grant from the Scanning Probe Microscopy Division under award No. DESC0004871 (Experiments and Analysis) and support from the Army Research Office under award No. W911NF-19-1-0279 (fabrication of devices).
The authors declare no competing interests.
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Nature Photonics thanks Sheng Shen and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
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Experimental and modelling data for Fig. 2a–d in an Excel sheet and Matlab codes for generating Fig. 2a–d from the data.
Experimental data for Fig. 3a–d in an Excel sheet and Matlab codes to generate the figures from the data.
Experimental data and estimated noise corresponding to Fig. 4a is provided in an Excel sheet along with Matlab code to generate Fig. 4a.
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Reihani, A., Meyhofer, E. & Reddy, P. Nanokelvin-resolution thermometry with a photonic microscale sensor at room temperature. Nat. Photon. 16, 422–427 (2022). https://doi.org/10.1038/s41566-022-01011-0