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Ion implanation success

A new way to define the shape of tiny light-emitting semiconductor pixels provides a means to fabricate arrays of InGaN blue micro-LEDs with a resolution as high as 8,500 pixels per inch.

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Fig. 1: Microscope image of an array of blue-emitting InGaN micro-LEDs and their electronic driving circuitry.


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Correspondence to Ulrich T. Schwarz.

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Schwarz, U.T. Ion implanation success. Nat. Photonics 15, 406–408 (2021).

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