Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

MICROLEDS

Ion implanation success

A new way to define the shape of tiny light-emitting semiconductor pixels provides a means to fabricate arrays of InGaN blue micro-LEDs with a resolution as high as 8,500 pixels per inch.

Access options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

Fig. 1: Microscope image of an array of blue-emitting InGaN micro-LEDs and their electronic driving circuitry.

References

  1. 1.

    Park. J. et al. Nat. Photon. https://doi.org/10.1038/s41566-021-00783-1 (2021).

  2. 2.

    Aurelien, D. Proc. SPIE 11706, 117060A (2021).

    Google Scholar 

  3. 3.

    Otto, I. et al. Appl. Phys. Lett. 106, 151108 (2015).

    ADS  Article  Google Scholar 

  4. 4.

    Goßler, C. et al. J. Phys. D 47, 205401 (2014).

    ADS  Article  Google Scholar 

  5. 5.

    Vico Triviño, N. et al. Appl. Phys. Lett. 100, 071103 (2012).

    ADS  Article  Google Scholar 

  6. 6.

    Chen, K. J. & Zhou, C. Phys. Status Solidi A 208, 434–438 (2011).

    ADS  Article  Google Scholar 

  7. 7.

    Xing, W., Liu, Z., Qiu, H., Ng, G. I. & Palacios, T. IEEE Electr. Dev. Lett. 38, 619–622 (2017).

    ADS  Article  Google Scholar 

  8. 8.

    Greenlee, J. D., Anderson, T. J., Feigelson, B. N., Hobart, K. D. & Kub, F. J. Phys. Status Solidi A 212, 2772–2775 (2015).

    ADS  Article  Google Scholar 

  9. 9.

    Xu, F., Tan, Y., Xie, Z. & Zhang, B. Opt. Express 29, 7757–7766 (2021).

    ADS  Article  Google Scholar 

  10. 10.

    Hamaguchi, T. et al. Appl. Phys. Express 12, 044004 (2019).

    ADS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Ulrich T. Schwarz.

Ethics declarations

Competing interests

The author declares no competing interests.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Schwarz, U.T. Ion implanation success. Nat. Photonics 15, 406–408 (2021). https://doi.org/10.1038/s41566-021-00825-8

Download citation

Search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing