A new way to define the shape of tiny light-emitting semiconductor pixels provides a means to fabricate arrays of InGaN blue micro-LEDs with a resolution as high as 8,500 pixels per inch.
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References
Park. J. et al. Nat. Photon. https://doi.org/10.1038/s41566-021-00783-1 (2021).
Aurelien, D. Proc. SPIE 11706, 117060A (2021).
Otto, I. et al. Appl. Phys. Lett. 106, 151108 (2015).
Goßler, C. et al. J. Phys. D 47, 205401 (2014).
Vico Triviño, N. et al. Appl. Phys. Lett. 100, 071103 (2012).
Chen, K. J. & Zhou, C. Phys. Status Solidi A 208, 434–438 (2011).
Xing, W., Liu, Z., Qiu, H., Ng, G. I. & Palacios, T. IEEE Electr. Dev. Lett. 38, 619–622 (2017).
Greenlee, J. D., Anderson, T. J., Feigelson, B. N., Hobart, K. D. & Kub, F. J. Phys. Status Solidi A 212, 2772–2775 (2015).
Xu, F., Tan, Y., Xie, Z. & Zhang, B. Opt. Express 29, 7757–7766 (2021).
Hamaguchi, T. et al. Appl. Phys. Express 12, 044004 (2019).
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Schwarz, U.T. Ion implanation success. Nat. Photonics 15, 406–408 (2021). https://doi.org/10.1038/s41566-021-00825-8
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DOI: https://doi.org/10.1038/s41566-021-00825-8
