Abstract
Spatial light modulators are essential optical elements in applications that require the ability to regulate the amplitude, phase and polarization of light, such as digital holography, optical communications and biomedical imaging. With the push towards miniaturization of optical components, static metasurfaces are used as competent alternatives. These evolved to active metasurfaces in which light-wavefront manipulation can be done in a time-dependent fashion. The active metasurfaces reported so far, however, still show incomplete phase modulation (below 360°). Here we present an all-solid-state, electrically tunable and reflective metasurface array that can generate a specific phase or a continuous sweep between 0 and 360° at an estimated rate of 5.4 MHz while independently adjusting the amplitude. The metasurface features 550 individually addressable nanoresonators in a 250 × 250 μm2 area with no micromechanical elements or liquid crystals. A key feature of our design is the presence of two independent control parameters (top and bottom gate voltages) in each nanoresonator, which are used to adjust the real and imaginary parts of the reflection coefficient independently. To demonstrate this array’s use in light detection and ranging, we performed a three-dimensional depth scan of an emulated street scene that consisted of a model car and a human figure up to a distance of 4.7 m.
This is a preview of subscription content, access via your institution
Access options
Access Nature and 54 other Nature Portfolio journals
Get Nature+, our best-value online-access subscription
$29.99 / 30 days
cancel any time
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Buy this article
- Purchase on Springer Link
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
Data availability
The data that support the plots within this paper and other findings of this study are available from the corresponding authors upon reasonable request. Source data are provided with this paper.
Code availability
All the scripts are available from the corresponding author upon reasonable request.
References
Savage, N. Digital spatial light modulators. Nat. Photon. 3, 170–172 (2009).
Goodman, J. W. Introduction to Fourier Optics Ch. 4 (McGraw-Hill, 1996).
Watts, C. M. et al. Terahertz compressive imaging with metamaterial spatial light modulators. Nat. Photon. 8, 605–609 (2014).
Grilli, S. et al. Whole optical wavefields reconstruction by digital holography. Opt. Express 9, 294–302 (2001).
Kim, Y. et al. Electrically tunable transmission-type beam deflector using liquid crystal with high angular resolution. Appl. Opt. 57, 5090–5094 (2018).
Li, S.-Q. et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface. Science 364, 1087–1090 (2019).
Wang, Y. et al. 2D broadband beamsteering with large-scale MEMS optical phased array. Optica 6, 557–562 (2019).
Yang, W. et al. High speed optical phased array using high contrast grating all-pass filters. Opt. Express 22, 20038–20044 (2014).
Zheludev, N. I. & Kivshar, Y. S. From metamaterials to metadevices. Nat. Mater. 11, 917–924 (2012).
Kildishev, A. V., Boltasseva, A. & Shalaev, V. M. Planar photonics with metasurfaces. Science 339, 1232009 (2013).
Arbabi, A., Horie, Y., Bagheri, M. & Faraon, A. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat. Nanotechnol. 10, 937–943 (2015).
Yu, N. et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334, 333–337 (2011).
Pors, A., Nielsen, M. G., Eriksen, R. L. & Bozhevolnyi, S. I. Broadband focusing flat mirrors based on plasmonic gradient metasurfaces. Nano Lett. 13, 829–834 (2013).
Lin, D., Fan, P., Hasman, E. & Brongersma, M. L. Dielectric gradient metasurface optical elements. Science 345, 298–302 (2014).
Shaltout, A. M., Shalaev, V. M. & Brongersma, M. L. Spatiotemporal light control with active metasurfaces. Science 364, 648 (2019).
Park, J., Kang, J.-H., Liu, X. & Brongersma, M. L. Electrically tunable epsilon-near-zero (ENZ) metafilm absorbers. Sci. Rep. 5, 15754 (2015).
Huang, Y.-W. et al. Gate-tunable conducting oxide metasurfaces. Nano Lett. 16, 5319–5325 (2016).
Park, J., Kang, J.-H., Kim, S. J., Liu, X. & Brongersma, M. L. Dynamic reflection phase and polarization control in metasurfaces. Nano Lett. 17, 407–413 (2017).
Shirmanesh, G., Sokhoyan, R., Pala, R. A. & Atwater, H. A. Dual-gated active metasurface at 1550 nm with wide (>300°) phase tunability. Nano Lett. 18, 2957–2963 (2018).
Karvounis, A., Gholipour, B., MacDonald, K. F. & Zheludev, Z. I. All-dielectric phase-change reconfigurable metasurface. Appl. Phys. Lett. 109, 051103 (2016).
Hosseini, P., Wright, C. D. & Bhaskaran, H. An optoelectronic framework enabled by low-dimensional phase-change films. Nature 511, 206–211 (2014).
Tittl, A. et al. A switchable mid-infrared plasmonic perfect absorber with multispectral thermal imaging capability. Adv. Mater. 27, 4597–4603 (2015).
Lee, J. et al. Giant nonlinear response from plasmonic metasurfaces coupled to intersubband transitions. Nature 511, 65–69 (2014).
Jun, Y. C. et al. Epsilon-near-zero strong coupling in metamaterial–semiconductor hybrid structures. Nano Lett. 13, 5391–5396 (2013).
Yao, Y. et al. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators. Nano Lett. 14, 6526–6532 (2014).
Dabidian, N. et al. Electrical switching of infrared light using graphene integration with plasmonic Fano resonant metasurfaces. ACS Photon. 2, 216–227 (2015).
Sherrott, M. C. et al. Experimental demonstration of >230° phase modulation in gate-tunable graphene–gold reconfigurable mid-infrared metasurfaces. Nano Lett. 17, 3027–3034 (2017).
van de Groep, J. et al. Exciton resonance tuning of an atomically thin lens. Nat. Photon. 14, 426–430 (2020).
Holsteen, A. L., Cihan, A. F. & Brongersma, M. L. Temporal color mixing and dynamic beam shaping with silicon metasurfaces. Science 365, 257–260 (2019).
Shaltout, A. M. et al. Spatiotemporal light control with frequency-gradient metasurfaces. Science 365, 374–377 (2019).
Jia, S. L., Wan, X., Su, P., Zhao, Y. J. & Cui, T. J. Broadband metasurface for independent control of reflected amplitude and phase. AIP Adv. 6, 045024 (2016).
Lee, G.-Y. et al. Complete amplitude and phase control of light using broadband holographic metasurfaces. Nanoscale 10, 4237–4245 (2018).
Haus, H. A. Waves and Fields in Optoelectronics (Prentice-Hall, 1984).
Horie, Y., Arbabi, A., Arbabi, E., Kamali, S. M. & Faraon, A. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas. ACS Photon. 8, 1711–1717 (2018).
Komljenovic, T., Helkey, R., Coldren, L. & Bowers, J. E. Sparse aperiodic arrays for optical beam forming and LiDAR. Opt. Express 25, 2511–2528 (2017).
Jiang, Q., Jin, G. & Cao, L. When metasurface meets hologram: principle and advances. Adv. Opt. Photon. 11, 518–576 (2019).
Lin, M.-L. et al. High mobility transparent conductive Al-doped ZnO thin films by atomic layer deposition. J. Alloys Compd. 727, 565–571 (2017).
Neshev, D. & Aharonovich, I. Optical metasurfaces: new generation building blocks for multi-functional optics. Light Sci. Appl. 7, 58 (2018).
Saleh, B. E. A. & Teich, M. C. Fundamentals of Photonics 2nd edn (Wiley-Interscience, 2007).
Palik, E. D. Handbook of Optical Constants of Solids Vol. 1 (Academic Press, 1997).
Safety of Laser Products—Part 1: Equipment Classification and Requirements 60825-1 edition 1.2 Table 6 (International Electrotechnical Commission, 2001).
Acknowledgements
We appreciate the support of N. Han, J.-Y. Hwang, B. J. Kim, M. K. Lee, D.-K. Nam, Y.-H. Cho, S.-K. Cho, G. Kim, H.-E. Lee, B. I. Yoo, S. Rhee, J.-J. Han and Y.-C. Cho. We thank H. A. Atwater for insightful discussions.
Author information
Authors and Affiliations
Contributions
J.P. and J. Kyoung conceived the initial idea. J.P., B.G.J., S.I.K., D.L. and S.H.S. expanded and developed the concept. J.P. and C.S. conducted theoretical modelling. B.G.J. and S.I.K. designed the experiments. S.I.K. and C.B.L. characterized the optical properties of the device. T.O. developed the driving board. S.I.K., K.-Y.Y. and Y.-Y.P. fabricated the device. S.K. conducted and analysed the modulation bandwidth experiment. B.G.J., D.L. and J.J. established the transmitter module for the ranging experiment. J.L., I.H. and K.H. implemented the receiver module for the ranging experiment. J. Kim, H.C., B.L.C., M.L.B. and S.-W.H. supervised the project. All the authors contributed to the manuscript preparation. H.C. and J.P. revised the manuscript.
Corresponding authors
Ethics declarations
Competing interests
J.P., J. Kyoung, S.I.K., C.S., B.G.J. and B.L.C. are inventors on US patent 10,670,941 held and submitted by Samsung Electronics that covers the use of the two-control-parameter approach for active wavefront manipulation and control. The authors declare no other competing interests.
Additional information
Peer review information Nature Nanotechnology thanks Luke Sweatlock, Jason Valentine and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
Publisher’s note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Extended data
Extended Data Fig. 1 Complete coverage of the phase and the amplitude (reflectivity) for arbitrary generation of a desired reflection coefficient.
a, Reflected phase map on the color scale obtained by running full field simulation with the conditions given in Fig. 2e and varying Vt from −3 V to 2.25 V and Vb from 4.05 V to 5.2 V: if (Vt, Vb) = (0.5 V, 4.6 V) is considered approximately as a reference origin, the result shows the full 360° phase coverage for every concentric ring, for example, along the loop made by the white dashed circular arrow, within the region of interest indicated by the black dashed boundary. b, Reflectivity map on the color scale for the same voltage ranges: every pseudo-circular annulus (or concentric ring) formed by a single color represents an identical reflectivity. When each of these annuli is superposed on top of the reflection-phase map shown in a, it becomes clear that for every amplitude, it is possible to find a voltage combination (Vt, Vb) that leads to any desired phase between 0 and 360°, allowing arbitrary generation of a desired reflection coefficient.
Extended Data Fig. 2 Phase-only and amplitude-only modulations using the two-control-parameter approach.
a, A set of voltage combinations selected for the phase-only modulation or the constant-amplitude and 0–360º phase shift. b, Trajectory of the reflection coefficients for the phase-only modulation: it makes a circular ring around the origin, showing the 0–360º phase shift. c, Real part of the electrical field along the x-axis, showing the gradual phase shift that eventually builds up to 360º. d, A set of voltage combinations selected for the amplitude-only modulation. e, Corresponding phasor trajectory that clearly exhibits the constant phase while varying the amplitude from 0 to its full value. f, Real part of the electrical field along the x-axis, showing no change in the phase while the intensity gradually increases.
Supplementary information
Supplementary Information
Supplementary Sections 1–17, Figs. 1–29, Table 1 and refs. 1–10.
Supplementary Video 1
Effect of the top voltage.
Supplementary Video 2
Effect of the bottom voltage.
Supplementary Video 3
Superposition of the top and bottom voltages.
Supplementary Video 4
Beam scanning for LiDAR.
Source data
Source Data Fig. 2
Numerically calculated complex reflection coefficient used in Fig. 2e showing the independent control between the phase and amplitude.
Source Data Fig. 3
Experimentally measured reflection phase and intensity for twelve voltage combinations used in Fig. 3f showing the 360º-phase change with uniform intensity.
Rights and permissions
About this article
Cite this article
Park, J., Jeong, B.G., Kim, S.I. et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications. Nat. Nanotechnol. 16, 69–76 (2021). https://doi.org/10.1038/s41565-020-00787-y
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/s41565-020-00787-y
This article is cited by
-
Dynamic light manipulation via silicon-organic slot metasurfaces
Nature Communications (2024)
-
Dynamical control of nanoscale light-matter interactions in low-dimensional quantum materials
Light: Science & Applications (2024)
-
Generating free-space structured light with programmable integrated photonics
Nature Photonics (2024)
-
Cost-Effective and Environmentally Friendly Mass Manufacturing of Optical Metasurfaces Towards Practical Applications and Commercialization
International Journal of Precision Engineering and Manufacturing-Green Technology (2024)
-
A universal metasurface antenna to manipulate all fundamental characteristics of electromagnetic waves
Nature Communications (2023)