Abstract
The continuous down-scaling of transistors has been the key to the successful development of current information technology. However, with Moore’s law reaching its limits, the development of alternative transistor architectures is urgently needed1. Transistors require a switching voltage of at least 60 mV for each tenfold increase in current, that is, a subthreshold swing (SS) of 60 mV per decade (dec). Alternative tunnel field-effect transistors (TFETs) are widely studied to achieve a sub-thermionic SS and high I60 (the current where SS becomes 60 mV dec–1)2. Heterojunction (HJ) TFETs show promise for delivering a high I60, but experimental results do not meet theoretical expectations due to interface problems in the HJs constructed from different materials. Here, we report a natural HJ-TFET with spatially varying layer thickness in black phosphorus without interface problems. We have achieved record-low average SS values over 4–5 dec of current (SSave_4dec ~22.9 mV dec–1 and SSave_5dec ~26.0 mV dec–1) with record-high I60 (I60 = 0.65–1 μA μm–1), paving the way for application in low-power switches.
This is a preview of subscription content, access via your institution
Access options
Access Nature and 54 other Nature Portfolio journals
Get Nature+, our best-value online-access subscription
$29.99 / 30 days
cancel any time
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
Data availability
The data that support the findings of this study are available from the corresponding authors on reasonable request.
References
Mack, C. A. Fifty years of Moore’s law. IEEE Trans. Semicond. Manuf. 24, 202–207 (2011).
Vandenberghe, W. G. et al. Figure of merit for and identification of sub-60 mV/decade devices. Appl. Phys. Lett. 102, 013510 (2013).
Pop, E. Energy dissipation and transport in nanoscale devices. Nano Res. 3, 147–169 (2010).
International Roadmap for Devices and Systems (IRDS) 2017 Edition https://irds.ieee.org/roadmap-2017 (2017).
Nikonov, D. E. & Young, I. A. Overview of beyond-CMOS devices and a uniform methodology for their benchmarking. Proc. IEEE 101, 2498–2533 (2013).
Seabaugh, A. et. al., Steep slope transistors: tunnel FETs and beyond.proc. IEEE European Solid-State Device Research Conference (ESSDERC) 349–351 (IEEE, 2016).
Tomioka, K., Yoshimura, M. & Fukui, T., Steep-slope tunnel field-effect transistors using III–V nanowire/Si heterojunction. In 2012 Symposium on VLSI Technology 47–48 (IEEE, 2012).
Sarkar, D. et al. A subthermionic tunnel field-effect transistor with an atomically thin channel. Nature 526, 91–95 (2015).
Knoch, J., Mantl, S. & Appenzeller, J. Impact of the dimensionality on the performance of tunneling FETs: bulk versus one-dimensional devices. Solid State Electron. 51, 572–578 (2007).
Fiori, G. et al. Electronics based on two-dimensional materials. Nat. Nanotechnol. 9, 768–779 (2014).
Ionescu, A. M. & Riel, H. Tunnel field-effect transistors as energy-efficient electronic switches. Nature 479, 329–337 (2011).
Verhulst, A. S., Vandenberghe, W. G., Maex, K. & Groeseneken, G. Boosting the on-current of a n-channel nanowire tunnel field-effect transistor by source material optimization. J. Appl. Phys. 104, 064514 (2008).
Nayfeh, O. M. et al. Design of tunneling field-effect transistors using strained-silicon/strained-germanium type-II staggered heterojunctions. IEEE Electron Device Lett. 29, 1074–1077 (2008).
Tran, V., Soklaski, R., Liang, Y. & Yang, L. Layer-controlled band gap and anisotropic excitons in few-layer black phosphorus. Phys. Rev. B 89, 235319 (2014).
Rasmussen, F. A. & Thygesen, K. S. Computational 2D materials database: electronic structure of transition-metal dichalcogenides and oxides. J. Phys. Chem. C 119, 13169–13183 (2015).
Qiao, J., Kong, X., Hu, Z. X., Yang, F. & Ji, W. High-mobility transport anisotropy and linear dichroism in few-layer black phosphorus. Nat. Commun. 5, 4475 (2014).
Li, L. et al. Black phosphorus field-effect transistors. Nat. Nanotechnol. 9, 372–377 (2014).
Li, L. et al. Quantum Hall effect in black phosphorus two-dimensional electron system. Nat. Nanotechnol. 11, 593–597 (2016).
Pan, Y. et al. Monolayer phosphorene−metal contacts. Chem. Mater. 28, 2100–2109 (2016).
Sajjad, R. N., Chern, W., Hoyt, J. L. & Antoniadis, D. A. Trap assisted tunneling and its effect on subthreshold swing of tunnel FETs. IEEE Trans. Electron Devices 63, 4380–4387 (2016).
Kang, J., Liu, W., Sarkar, D., Jena, D. & Banerjee, K. Computational study of metal contacts to monolayer transition-metal dichalcogenide semiconductors. Phys. Rev. X 4, 031005 (2014).
Tang, W., Rassay, S. S. & Ravindra, N. M. Electronic & optical properties of transition-metal dichalcogenides. Madridge J. Nanotechnol. Nanosci. 2, 58–64 (2017).
Rahi, S. B., Ghosh, B. & Bishnoi, B. Temperature effect on hetero structure junctionless tunnel FET. J. Semicond. 36, 034002 (2015).
Rahi, S. B., Asthana, P. & Gupta, S. Heterogate junctionless tunnel field-effect transistor: future of low-power devices. J. Comput. Electron. 16, 30–38 (2017).
Abedini, M., Ziabari, S. A. S. & Eskandarin, A. A high-performance p-type based heterostructure electrically doped NTFET and representation of a neural network model. Appl. Phys. A 125, 318 (2019).
Natarajan, S. et. al., A 14nm logic technology featuring 2nd-generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 µm2 SRAM cell size. In 2014 IEEE International Electron Devices Meeting 3.7.1–3.7.3 (IEEE, 2014).
Chen, F. W., Ilatikhameneh, H., Ameen, T. A., Klimeck, G. & Rahman, R. Thickness engineered tunnel field-effect transistors based on phosphorene. IEEE Electron Device Lett. 38, 130–133 (2017).
Zomer, P. J., Guimaraes, M. H. D., Brant, J. C., Tombros, N. & van Wees, B. J. Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride. Appl. Phys. Lett. 105, 013101 (2014).
Kim, J. et al. Anomalous polarization dependence of Raman scattering and crystallographic orientation of black phosphorus. Nanoscale 7, 18708–18715 (2015).
Ling, X. et al. Anisotropic electron-photon and electron-phonon interactions in black phosphorus. Nano Lett. 16, 2260–2267 (2016).
Acknowledgements
We thank P. Kim, A. Seabaugh, R. Sajjad, E. Yablonovitch, F. Liu, G. Klimeck, H. J. Choi and E. H. Hwang for helpful discussions. We also thank C. Lee for help with the dry-transfer technique. S. Cho acknowledges support from the Korea NRF (Grant no. 2019M3F3A1A03079760 and Grant no. 2016R1A5A1008184) and the KI 2019 Transdisciplinary Research Program. K.W. and T.T. acknowledge support from the Elemental Strategy Initiative conducted by MEXT, Japan, A3 Foresight by JSPS and CREST (JPMJCR15F3), JST.
Author information
Authors and Affiliations
Contributions
S. Cho conceived and supervised the project. S.K. fabricated devices and performed measurements. G.M. and W.S. assisted with fabrication of devices. G.M. and S. Chang assisted with the Raman and photoluminescence measurement of the BP flakes. K.W. and T.T. grew high-quality hBN single crystals. G.M., W.S., H.L., B.K. and T.J. assisted with the low-temperature transport measurements. S. Cho and S.K. analysed the data and wrote the manuscript. All the authors contributed to editing the manuscript.
Corresponding author
Ethics declarations
Competing interests
The authors declare no competing interests.
Additional information
Publisher’s note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Supplementary information
Supplementary Information
Supplementary Figs. 1–20, Table 1 and refs. 1–41.
Rights and permissions
About this article
Cite this article
Kim, S., Myeong, G., Shin, W. et al. Thickness-controlled black phosphorus tunnel field-effect transistor for low-power switches. Nat. Nanotechnol. 15, 203–206 (2020). https://doi.org/10.1038/s41565-019-0623-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/s41565-019-0623-7
This article is cited by
-
An ultra energy-efficient hardware platform for neuromorphic computing enabled by 2D-TMD tunnel-FETs
Nature Communications (2024)
-
A hot-emitter transistor based on stimulated emission of heated carriers
Nature (2024)
-
High-throughput approach to explore cold metals for electronic and thermoelectric devices
npj Computational Materials (2024)
-
Performance Limits and Advancements in Single 2D Transition Metal Dichalcogenide Transistor
Nano-Micro Letters (2024)
-
The Roadmap of 2D Materials and Devices Toward Chips
Nano-Micro Letters (2024)