A nanoelectromechanical system made from a nanobeam embedded in a phononic crystal and coupled to a pair of superconducting microwave oscillators can couple hypersonic sound quanta at 0.425 GHz and light quanta with high coherence.
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Burkard, G. Quantum sound on a chip. Nat. Nanotechnol. 14, 311–312 (2019). https://doi.org/10.1038/s41565-019-0391-4