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Spatially controlled doping of two-dimensional SnS2 through intercalation for electronics

Nature Nanotechnology volume 13, pages 294–299 (2018)Cite this article

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Abstract

Doped semiconductors are the most important building elements for modern electronic devices1. In silicon-based integrated circuits, facile and controllable fabrication and integration of these materials can be realized without introducing a high-resistance interface2,3. Besides, the emergence of two-dimensional (2D) materials enables the realization of atomically thin integrated circuits4,5,6,7,8,9. However, the 2D nature of these materials precludes the use of traditional ion implantation techniques for carrier doping and further hinders device development10. Here, we demonstrate a solvent-based intercalation method to achieve p-type, n-type and degenerately doped semiconductors in the same parent material at the atomically thin limit. In contrast to naturally grown n-type S-vacancy SnS2, Cu intercalated bilayer SnS2 obtained by this technique displays a hole field-effect mobility of ~40 cm2 V−1 s−1, and the obtained Co-SnS2 exhibits a metal-like behaviour with sheet resistance comparable to that of few-layer graphene5. Combining this intercalation technique with lithography, an atomically seamless p–n–metal junction could be further realized with precise size and spatial control, which makes in-plane heterostructures practically applicable for integrated devices and other 2D materials. Therefore, the presented intercalation method can open a new avenue connecting the previously disparate worlds of integrated circuits and atomically thin materials.

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Fig. 1: Realization of a p-type semiconductor, n-type semiconductor and highly conductive metal from the parent material (SnS2).
Fig. 2: STEM Z-contrast images and elemental maps of the Cu-intercalated SnS2.
Fig. 3: Electrical properties of SnS2, Cu-SnS2 and Co-SnS2 and their corresponding band structures by DFT simulation.
Fig. 4: Construction of SnS2, Cu-SnS2 and Co-SnS2 in-plane 2D heterostructures.

References

  1. Tan, C. et al. Recent advances in ultrathin two-dimensional nanomaterials. Chem. Rev. 117, 6225–6331 (2017).

    Article  Google Scholar 

  2. Kappera, R. et al. Phase-engineered low-resistance contacts for ultrathin MoS2 transistors. Nat. Mater. 13, 1128–1134 (2014).

    Article  Google Scholar 

  3. Li, M. Y. et al. Epitaxial growth of a monolayer WSe2–MoS2 lateral p–n junction with an atomically sharp interface. Science 349, 524–528 (2015).

    Article  Google Scholar 

  4. Sarkar, D. et al. A subthermionic tunnel field-effect transistor with an atomically thin channel. Nature 526, 91–95 (2015).

    Article  Google Scholar 

  5. Novoselov, K. S. et al. Two-dimensional gas of massless Dirac fermions in graphene. Nature 438, 197–200 (2005).

    Article  Google Scholar 

  6. Pospischil, A., Furchi, M. M. & Mueller, T. Solar-energy conversion and light emission in an atomic monolayer p–n diode. Nat. Nanotech. 9, 257–261 (2014).

    Article  Google Scholar 

  7. Radisavljevic, B., Radenovic, A., Brivio, J., Giacometti, V. & Kis, A. Single-layer MoS2 transistors. Nat. Nanotech. 6, 147–150 (2011).

    Article  Google Scholar 

  8. Huang, C. M. et al. Lateral heterojunctions within monolayer MoSe2–WSe2 semiconductors. Nat. Mater. 13, 1096–1101 (2014).

    Article  Google Scholar 

  9. Gong, Y. J. et al. Vertical and in-plane heterostructures from WS2/MoS2 monolayers. Nat. Mater. 13, 1135–1142 (2014).

    Article  Google Scholar 

  10. Lei, S. D. et al. Surface functionalization of two-dimensional metal chalcogenides by Lewis acid–base chemistry. Nat. Nanotech. 11, 465–471 (2016).

    Article  Google Scholar 

  11. Mak, K. F., Lee, C., Hone, J., Shan, J. & Heinz, T. F. Atomically thin MoS2: a new direct-gap semiconductor. Phys. Rev. Lett. 105, 136805 (2010).

    Article  Google Scholar 

  12. Baugher, B. W. H., Churchill, H. O. H., Yang, Y. F. & Jarillo-Herrero, P. Optoelectronic devices based on electrically tunable p–n diodes in a monolayer dichalcogenide. Nat. Nanotech. 9, 262–267 (2014).

    Article  Google Scholar 

  13. Ross, J. S. et al. Electrically tunable excitonic light-emitting diodes based on monolayer WSe2 p–n junctions. Nat. Nanotech. 9, 268–272 (2014).

    Article  Google Scholar 

  14. Li, H. et al. Composition-modulated two-dimensional semiconductor lateral heterostructures via layer-selected atomic substitution. ACS Nano. 11, 961–967 (2017).

    Article  Google Scholar 

  15. Yang, T. et al. Van der Waals epitaxial growth and optoelectronics of large-scale WSe2/SnS2 vertical bilayer p–n junctions. Nat. Commun. 8, 1906 (2017).

    Article  Google Scholar 

  16. Duan, X. D. et al. Lateral epitaxial growth of two-dimensional layered semiconductor heterojunctions. Nat. Nanotech. 9, 1024–1030 (2014).

    Article  Google Scholar 

  17. Allain, A., Kang, J. H., Banerjee, K. & Kis, A. Electrical contacts to two-dimensional semiconductors. Nat. Mater. 14, 1195–1205 (2015).

    Article  Google Scholar 

  18. Wang, L. et al. One-dimensional electrical contact to a two-dimensional material. Science 342, 614–617 (2013).

    Article  Google Scholar 

  19. Cho, S. et al. Phase patterning for ohmic homojunction contact in MoTe2. Science 349, 625–628 (2015).

    Article  Google Scholar 

  20. Koski, K. J. et al. Chemical intercalation of zerovalent metals into 2D layered Bi2Se3 nanoribbons. J. Am. Chem. Soc. 134, 13773–13779 (2012).

    Article  Google Scholar 

  21. Lévy, F. A. (ed.) Intercalated layered materials (Springer, Dordrecht, 1979).

  22. Yuan, H. T. et al. Liquid-gated electric-double-layer transistor on layered metal dichalcogenide, SnS2. Appl. Phys. Lett. 98, 012102 (2011).

    Article  Google Scholar 

  23. Song, H. S. et al. High-performance top-gated monolayer SnS2 field-effect transistors and their integrated logic circuits. Nanoscale 5, 9666–9670 (2013).

    Article  Google Scholar 

  24. Ahn, J. H. et al. Deterministic two-dimensional polymorphism growth of hexagonal n-type SnS2 and orthorhombic p-type SnS Crystals. Nano Lett. 15, 3703–3708 (2015).

    Article  Google Scholar 

  25. Ye, G. et al. Synthesis of large-scale atomic-layer SnS2 through chemical vapor deposition. Nano Res. 10, 2386–2394 (2017).

    Article  Google Scholar 

  26. Yao, J. et al. Optical transmission enhacement through chemically tuned two-dimensional bismuth chalcogenide nanoplates. Nat. Commun. 5, 5670 (2014).

    Article  Google Scholar 

  27. Wang, Y. X. et al. Transforming layered to nonlayered two-dimensional materials: cation exchange of SnS2 to Cu2SnS3. ACS Energy Lett. 1, 175–181 (2016).

    Article  Google Scholar 

  28. Jaegerrnann, W., Ohuchi, F. S. & Parkinson, B. A. Electrochemical and solid state reactions of copper with n-SnS2. Phys. Chem. 93, 29–37 (1989).

    Article  Google Scholar 

  29. Bointon, T. H. et al. Approaching magnetic ordering in graphene materials by FeCl3 intercalation. Nano Lett. 14, 1751–1755 (2014).

    Article  Google Scholar 

  30. Allen, L. J., D’Alfonso, A. J. & Findlay, S. D. Modelling the inelastic scattering of fast electrons. Ultramicroscopy 151, 11–22 (2015).

    Article  Google Scholar 

  31. Xu, B., Fell, C. R., Chi, M. & Meng, Y. S. Identifying surface structural changes in layered Li-excess nickel manganese oxides in high voltage lithium ion batteries: a joint experimental and theoretical study. Energ. Environ. Sci. 4, 2223–2233 (2011).

    Article  Google Scholar 

  32. Chuang, H. J. et al. High mobility WSe2 p- and n-type field-effect transistors contacted by highly doped graphene for low-resistance contacts. Nano Lett. 14, 3594–3601 (2014).

    Article  Google Scholar 

  33. Scholz, G., Joensen, P., Reyes, J. M. & Frindt, R. F. Intercalation of Ag in TaS2 and TiS2. Phys. B & C 105, 214–217 (1981).

    Article  Google Scholar 

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Acknowledgements

This work was supported by the Department of Energy (DOE), Office of Basic Energy Sciences, Division of Materials Sciences and Engineering (contract no. DE-AC02-76SF00515). P.T. and S.C.Z. also acknowledge FAME, one of six centres of STARnet, a Semiconductor Research Corporation programme sponsored by MARCO and DARPA. Electron microscopy at ORNL (S.Z.Y., M.F.C. and W.Z.) was supported by the US Department of Energy, Office of Science, Basic Energy Sciences, Materials Sciences and Engineering Division, and was performed in part as a user project at the ORNL Center for Nanophase Materials Sciences, which is a DOE Office of the Science User Facility.

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Authors and Affiliations

  1. Department of Material Science and Engineering, Stanford University, Stanford, CA, USA

    Yongji Gong, Hongtao Yuan, Chun-Lan Wu, Ankun Yang, Guodong Li, Bofei Liu, Jorik van de Groep, Mark L. Brongersma & Yi Cui

  2. School of Material Science and Engineering, Beihang University, Beijing, China

    Yongji Gong

  3. Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, USA

    Hongtao Yuan, Shou-Cheng Zhang & Yi Cui

  4. National Laboratory of Solid-State Microstructures, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, China

    Hongtao Yuan

  5. Department of Physics, Stanford University, Stanford, CA, USA

    Peizhe Tang & Shou-Cheng Zhang

  6. Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA

    Shi-Ze Yang, Matthew F. Chisholm & Wu Zhou

  7. School of Physical Sciences, CAS Key Laboratory of Vacuum Physics, University of Chinese Academy of Sciences, Beijing, China

    Wu Zhou

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  1. Yongji Gong
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Contributions

Y.G. and Y.C. conceived and designed the experiments. Y.G. synthesized the sample and performed the intercalation reaction. H.Y., C.L.W., Y.G. and A.Y. performed sample fabrication and transport measurements. P.T. and S.C.Z. carried out DFT calculations. S.Z.Y., M.F.C. and W.Z. worked on the TEM measurements and analysed the data. A.Y., J.G. and M.L.B. measured the optical reflection spectra of the samples. G.L. performed XPS. All authors participated in discussions and co-wrote the paper.

Corresponding author

Correspondence to Yi Cui.

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Supplementary Information

Supplementary Methods, Supplementary Table 1, Supplementary Figures 1–23.

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Gong, Y., Yuan, H., Wu, CL. et al. Spatially controlled doping of two-dimensional SnS2 through intercalation for electronics. Nature Nanotech 13, 294–299 (2018). https://doi.org/10.1038/s41565-018-0069-3

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