Abstract
A key goal of metalens research is to achieve wavefront shaping of light using optical elements with thicknesses on the order of the wavelength. Such miniaturization is expected to lead to compact, nanoscale optical devices with applications in cameras, lighting, displays and wearable optics. However, retaining functionality while reducing device size has proven particularly challenging. For example, so far there has been no demonstration of broadband achromatic metalenses covering the entire visible spectrum. Here, we show that by judicious design of nanofins on a surface, it is possible to simultaneously control the phase, group delay and group delay dispersion of light, thereby achieving a transmissive achromatic metalens with large bandwidth. We demonstrate diffraction-limited achromatic focusing and achromatic imaging from 470 to 670 nm. Our metalens comprises only a single layer of nanostructures whose thickness is on the order of the wavelength, and does not involve spatial multiplexing or cascading. While this initial design (numerical aperture of 0.2) has an efficiency of about 20% at 500 nm, we discuss ways in which our approach may be further optimized to meet the demand of future applications.
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References
Chen, W. T. et al. Immersion meta-lenses at visible wavelengths for nanoscale imaging. Nano Lett. 17, 3188–3194 (2017).
Khorasaninejad, M. et al. Multispectral chiral imaging with a meta-lens. Nano Lett. 16, 4595–4600 (2016).
Khorasaninejad, M. et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging. Science 352, 1190–1194 (2016).
Schonbrun, E., Seo, K. & Crozier, K. B. Reconfigurable imaging systems using elliptical nanowires. Nano Lett. 11, 4299–4303 (2011).
Chen, W. T. et al. Integrated plasmonic metasurfaces for spectropolarimetry. Nanotechnology 27, 224002 (2016).
Balthasar Mueller, J. P., Leosson, K. & Capasso, F. Ultracompact metasurface in-line polarimeter. Optica 3, 42–47 (2016).
Pors, A., Nielsen, M. G. & Bozhevolnyi, S. I. Plasmonic metagratings for simultaneous determination of Stokes parameters. Optica 2, 716–723 (2015).
Chen, W. T. et al. Generation of wavelength-independent subwavelength Bessel beams using metasurfaces. Light Sci. Appl. 6, e16259 (2017).
Lin, D., Fan, P., Hasman, E. & Brongersma, M. L. Dielectric gradient metasurface optical elements. Science 345, 298–302 (2014).
Wu, P. C. et al. Versatile polarization generation with an aluminum plasmonic metasurface. Nano Lett. 17, 445–452 (2017).
Zhao, Z. et al. Multispectral optical metasurfaces enabled by achromatic phase transition. Sci. Rep. 5, 15781 (2015).
Pu, M. et al. Catenary optics for achromatic generation of perfect optical angular momentum. Sci. Adv 1, e1500396 (2015).
Ye, W. et al. Spin and wavelength multiplexed nonlinear metasurface holography. Nat. Commun. 7, 11930 (2016).
Zheng, G. et al. Metasurface holograms reaching 80% efficiency. Nat. Nanotech. 10, 308–312 (2015).
Li, X. et al. Multicolor 3D meta-holography by broadband plasmonic modulation. Sci. Adv. 2, e1601102 (2016).
Aieta, F., Kats, M. A., Genevet, P. & Capasso, F. Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science 347, 1342–1345 (2015).
Hu, J., Liu, C.-H., Ren, X., Lauhon, L. J. & Odom, T. W. Plasmonic lattice lenses for multiwavelength achromatic focusing. ACS Nano 10, 10275–10282 (2016).
Avayu, O., Almeida, E., Prior, Y. & Ellenbogen, T. Composite functional metasurfaces for multispectral achromatic optics. Nat. Commun. 8, 14992 (2017).
Faklis, D. & Morris, G. M. Spectral properties of multiorder diffractive lenses. Appl. Opt. 34, 2462–2468 (1995).
Li, Y. et al. Achromatic flat optical components via compensation between structure and material dispersions. Sci. Rep. 6, 19885 (2016).
Li, M., Al-Joumayly, M. A. & Behdad, N. Broadband true-time-delay microwave lenses based on miniaturized element frequency selective surfaces. IEEE Trans. Antennas Propag. 61, 1166–1179 (2013).
Cheng, J. & Mosallaei, H. Truly achromatic optical metasurfaces: a filter circuit theory-based design. J. Opt. Soc. Am. B 32, 2115–2121 (2015).
Ajioka, J. S. Broadband group delay waveguide lens. US patent 126,075 (1982).
Khorasaninejad, M. et al. Achromatic metalens over 60 nm bandwidth in the visible and metalens with reverse chromatic dispersion. Nano Lett. 17, 1819–1824 (2017).
Shrestha, S., Overvig, A. & Yu, N. Broadband achromatic metasurface lenses. In Conf. Lasers and Electro-Optics FM1H.3 (2017).
Arbabi, E., Arbabi, A., Kamali, S. M., Horie, Y. & Faraon, A. Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces. Optica 4, 625–632 (2017).
Wang, S. et al. Broadband achromatic optical metasurface devices. Nat. Commun. 8, 187 (2017).
Chen, L., Shakya, J. & Lipson, M. Subwavelength confinement in an integrated metal slot waveguide on silicon. Opt. Lett. 31, 2133–2135 (2006).
Zhang, L. et al. Silicon waveguide with four zero-dispersion wavelengths and its application in on-chip octave-spanning supercontinuum generation. Opt. Express 20, 1685–1690 (2012).
Devlin, R. C., Khorasaninejad, M., Chen, W. T., Oh, J. & Capasso, F. Broadband high-efficiency dielectric metasurfaces for the visible spectrum. Proc. Natl Acad. Sci. USA 113, 10473–10478 (2016).
Yu, N. & Capasso, F. Flat optics with designer metasurfaces. Nat. Mater. 13, 139–150 (2014).
Karagodsky, V., Sedgwick, F. G. & Chang-Hasnain, C. J. Theoretical analysis of subwavelength high contrast grating reflectors. Opt. Express 18, 16973–16988 (2010).
Wang, S. & Magnusson, R. Theory and applications of guided-mode resonance filters. Appl. Opt. 32, 2606–2613 (1993).
Escuti, M. J., Kim, J. & Kudenov, M. W. Controlling light with geometric-phase holograms. Opt. Photon. News 27, 22–29 (2016).
Byrnes, S. J., Lenef, A., Aieta, F. & Capasso, F. Designing large, high-efficiency, high-numerical-aperture, transmissive meta-lenses for visible light. Opt. Express 24, 5110–5124 (2016).
Lin, Z., Groever, B., Capasso, F., Rodriguez, A. W. & Lončar, M. Topology optimized multi-layered meta-optics. Preprint at https://arxiv.org/abs/1706.06715 (2017).
Khorasaninejad, M. et al. Polarization-insensitive metalenses at visible wavelengths. Nano Lett. 16, 7229–7234 (2016).
Wang, S., Lai, J., Wu, T., Chen, C. & Sun, J. Wide-band achromatic flat focusing lens based on all-dielectric subwavelength metasurface. Opt. Express 25, 7121–7130 (2017).
Yang, J. et al. Broadband planar achromatic anomalous reflector based on dispersion engineering of spoof surface plasmon polariton. Appl. Phys. Lett. 109, 211901 (2016).
Dastmalchi, B., Tassin, P., Koschny, T. & Soukoulis, C. M. Strong group-velocity dispersion compensation with phase-engineered sheet metamaterials. Phys. Rev. B 89, 115123 (2014).
Decker, M. et al. High-efficiency dielectric Huygens’ surfaces. Adv. Opt. Mater. 3, 813–820 (2015).
Caloz, C. Metamaterial dispersion engineering concepts and applications. Proc. IEEE 99, 1711–1719 (2011).
Qu, C. et al. Tailor the functionalities of metasurfaces based on a complete phase diagram. Phys. Rev. Lett. 115, 235503 (2015).
Gorelick, S., Guzenko, V. A., Vila-Comamala, J. & David, C. Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating. Nanotechnology 21, 295303 (2010).
Lee, S., Park, B., Kim, J. S. & Kim, T.-i Designs and processes toward high-aspect-ratio nanostructures at the deep nanoscale: unconventional nanolithography and its applications. Nanotechnology 27, 474001 (2016).
Gissibl, T., Thiele, S., Herkommer, A. & Giessen, H. Two-photon direct laser writing of ultracompact multi-lens objectives. Nat. Photon. 10, 554–560 (2016).
Shkondin, E. et al. Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition. J. Vac. Sci. Technol. 34, 031605 (2016).
Groever, B., Chen, W. T. & Capasso, F. Meta-lens doublet in the visible region. Nano Lett. 17, 4902–4907 (2017).
Arbabi, A. et al. Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations. Nat. Commun. 7, 13682 (2016).
Herzberger, M. & McClure, N. R. The design of superachromatic lenses. Appl. Opt. 2, 553–560 (1963).
Acknowledgements
This work was supported by the Air Force Office of Scientific Research (MURI, grant no. FA9550-14-1-0389 and grant no. FA9550-16-1-0156). This work was performed in part at the Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation under NSF award no. 1541959. CNS is part of Harvard University. F.C. gratefully acknowledges a gift from Huawei Inc. under its HIRP FLAGSHIP programme. We thank Y.-W. Huang and J. Sisler for their help with measurements and simulations, respectively.
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W.T.C. and F.C. conceived the study. A.Y.Z. fabricated the metalenses. W.T.C., V.S., M.K., Z.S. and E.L. performed simulations and developed codes. W.T.C., A.Y.Z. and E.L. measured the metalenses. W.T.C., A.Y.Z., M.K. and F.C. wrote the manuscript. All authors discussed the results and commented on the manuscript.
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Supplementary Information
Supplementary Figures 1–11
Videos
Supplementary Video 1
Phase profile of achromatic metalens
Supplementary Video 2
Phase profile of chromatic metalens (n = 2)
Supplementary Video 3
Simulated point spread functions of achromatic and chromatic metalenses
Supplementary Video 4
A real-time video of focal spots for an achromatic metalens (NA = 0.2)
Supplementary Video 5
A real-time video of focal spots for an achromatic metalens (NA = 0.02)
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Chen, W.T., Zhu, A.Y., Sanjeev, V. et al. A broadband achromatic metalens for focusing and imaging in the visible. Nature Nanotech 13, 220–226 (2018). https://doi.org/10.1038/s41565-017-0034-6
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DOI: https://doi.org/10.1038/s41565-017-0034-6
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