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Two-dimensional materials

Hybrid dielectrics for two-dimensional electronics

Using the van der Waals crystal Sb2O3 as a buffer layer enables the growth of high-κ dielectrics on two-dimensional materials via atomic layer deposition.

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Fig. 1: Schematic illustration of the hybrid HfO2/Sb2O3 dielectric growth on MoS2.


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Correspondence to Yang Liu or James C. Hone.

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Liu, Y., Hone, J.C. Hybrid dielectrics for two-dimensional electronics. Nat. Mater. 22, 1059–1060 (2023).

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