Using the van der Waals crystal Sb2O3 as a buffer layer enables the growth of high-κ dielectrics on two-dimensional materials via atomic layer deposition.
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The authors declare no competing interests.
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Liu, Y., Hone, J.C. Hybrid dielectrics for two-dimensional electronics. Nat. Mater. 22, 1059–1060 (2023). https://doi.org/10.1038/s41563-023-01642-w