Correction to: Nature Materials https://doi.org/10.1038/s41563-022-01424-w. Published online 19 December 2022.

The version of this article originally published omitted a second affiliation for Junho Choi: “Semiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon, Republic of Korea”. The error has been corrected in the HTML and PDF versions of the article.