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Integrating graphene into semiconductor fabrication lines

Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization.

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References

  1. 1.

    Wang, L. et al. Science 342, 614–617 (2013).

  2. 2.

    Nair, R. R. et al. Science 320, 1308 (2008).

  3. 3.

    Geim, A. K. & Novoselov, K. S. Nat. Mater. 6, 183–191 (2007).

  4. 4.

    Konstantatos, G. et al. Nat. Nanotechol. 7, 363–368 (2012).

  5. 5.

    Schall, D. et al. in Proc. Optical Fiber Communication Conference M2I.4 (OSA, 2018).

  6. 6.

    Dauber, J. et al. Appl. Phys. Lett. 106, 193501 (2015).

  7. 7.

    Smith, A. D. et al. Nano Lett. 13, 3237–3242 (2013).

  8. 8.

    Wang, T. et al. Nano-Micro Lett. 8, 95–119 (2016).

  9. 9.

    Huang, L. et al. Sci. Rep. 4, 5548 (2014).

  10. 10.

    Goossens, S. et al. Nat. Photon. 11, 366–371 (2017).

  11. 11.

    Novoselov, K. S., Mishchenko, A., Carvalho, A. & Castro Neto, A. H. Science 353, aac9439 (2016).

  12. 12.

    Geng, H. Semiconductor Manufacturing Handbook (McGraw-Hill Education, 2017).

  13. 13.

    Li, M. et al. Adv. Sci. 3, 1600003 (2016).

  14. 14.

    Gao, L. et al. Nature 505, 190–194 (2014).

  15. 15.

    Zhang, Y., Zhang, L. & Zhou, C. Acc. Chem. Res. 46, 2329–2339 (2013).

  16. 16.

    Banszerus, L. et al. Sci. Adv. 1, e1500222 (2015).

  17. 17.

    Gannett, W. et al. Appl. Phys. Lett. 98, 242105 (2011).

  18. 18.

    Xu, X. et al. Sci. Bull. 62, 1074–1080 (2017).

  19. 19.

    Vlassiouk, I. V. et al. Nat. Mater. 17, 318–322 (2018).

  20. 20.

    Chen, M., Haddon, R. C., Yan, R. & Bekyarova, E. Mater. Horiz. 4, 1054–1063 (2017).

  21. 21.

    Giubileo, F. & Di Bartolomeo, A. Progr. Surf. Sci. 92, 143–175 (2017).

  22. 22.

    Anzi, L. et al. 2D Mater. 5, 025014 (2018).

  23. 23.

    Das, S., Chen, H.-Y., Penumatcha, A. V. & Appenzeller, J. Nano Lett. 13, 100–105 (2013).

  24. 24.

    Allain, A., Kang, J., Banerjee, K. & Kis, A. Nat. Mater. 14, 1195–1205 (2015).

  25. 25.

    Iannazzo, M. et al. IEEE Trans. Electron Devices. 62, 3870–3875 (2015).

  26. 26.

    Agarwal, T. et al. IEEE J. Electron Devices Soc. 6, 979–986 (2018).

  27. 27.

    Janssen, T. J. B. M. et al. Metrologia 49, 294–306 (2012).

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Acknowledgements

All authors acknowledge funding from the European Union H2020 Graphene Flagship project (grant agreement no. 785219).

Author information

All authors conceived this work and collaborated equally in the writing of the text.

Correspondence to Daniel Neumaier.

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Fig. 1: Applications for two-dimensional materials.
Fig. 2: Flow chart for BEOL integration.