Fig. 2: Structure design and theoretical simulation of the μTUD. | Nature Communications

Fig. 2: Structure design and theoretical simulation of the μTUD.

From: Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Fig. 2

a Cross-sectional schematic of the μTUD under atmospheric pressure for analytical modeling. b 3D mapping of the static displacement surface of the membrane based on analytical modeling. c Displacement response of the μTUD in the frequency spectrum via numerical analysis. d Static displacement surface for the membrane based on numerical analysis.

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