Fig. 2 | Nature Communications

Fig. 2

From: Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides

Fig. 2

ALD-process sequence for the Er2O3–Al2O3 supercycle: (1) Er(thd)3 pulsing on the preprocessed Si3N4 slot waveguide. (2) Resulting device layer after nitrogen purging, oxygen plasma pulsing, and nitrogen purging. (3) TMA-pulsing on the Er2O3–Si3N4 surface. (4) Resulting device layer after nitrogen purging, water pulsing, and nitrogen purging. The colors for the individual atoms/molecules are as follows: C: gray; Al: green; O: red; H: white; Er: magenta; thd/methyl ligand (L): yellow

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