Fig. 1 | Nature Communications

Fig. 1

From: Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides

Fig. 1

Schematic of the silicon nitride waveguide chip design. The waveguide chip is 7 mm in length and it contains several waveguide channels with different dimensions. Each waveguide channel contains one single-mode slot waveguide, followed by a multi-mode strip waveguide, a multi-mode to single-mode transition taper, a single-mode strip waveguide and a linear strip-to-slot mode converter at the input and output sides of the corresponding channel. The strip waveguides, transition tapers and mode converters were covered with a HSQ-resist to protect them with the succeeding gain layer deposition

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