Fig. 3: | Nature Communications

Fig. 3

From: Acoustically actuated ultra-compact NEMS magnetoelectric antennas

Fig. 3

ME FBAR antenna. a Schematic illustration of the magnetoelectric (ME) thin-film bulk acoustic wave resonators (FBAR) and the antenna measurement setup. The horn antenna and ME FBAR are connected to the S 1 and S 2 port of a network analyzer. b Scanning electron microscopy (SEM) images of the fabricated the ME FBAR. The red and blue areas show the suspended circular plate and AlN anchors. The yellow area presents the electrode. c Return loss curve (S 22) of ME FBAR. The inset shows the out-of-plane displacement of the circular disk at resonance peak position. d Transmission and receiving behavior (S 12 and S 21) of ME FBAR. e Return loss (S 22) curve of the non-magnetic Al/AlN control FBAR. f Transmission and receiving behavior (S 12 and S 21) of the non-magnetic Al/AlN control FBAR