Fig. 2: Basic performance of the prepared capacitive pressure sensors.

a Capacitance variation–pressure curves for the hexagonal configuration with different pore sizes, including 300, 400, 500, and 600 μm, and the nonstructured configuration in the range of 0–200 kPa. b Amplification of the sensitivity curves in the range of 0–50 kPa. c Relative capacitance variation at different external pressures, including 4.5, 16, 35.7, 56, 94, 128, 158, and 200 kPa. d Relative capacitance variation and corresponding applied pressure–time curves at the same time. e Response times for rising and falling loads. f Fifteen thousand cycle repeatability of the sensor under an applied pressure of 50 kPa