Fig. 4: The prediction of the synchronization bandwidth. | Microsystems & Nanoengineering

Fig. 4: The prediction of the synchronization bandwidth.

From: Programmable synchronization enhanced MEMS resonant accelerometer

Fig. 4

Compared with the target working range of ±1 g, the current reading oscillator has a rather small synchronization bandwidth, which could not readily cover the range required by the accelerometer. Although it was theoretically possible to maximize the synchronization bandwidth by optimizing the structural parameter of the resonator, \(\beta ^{1/2}Qs_0\sim 0.09\) implies that the quality factor Q of the resonator must reach at least 100k while the structure still has relatively strong nonlinearity. Moreover, a strong s0 might pose a threat to the integrity of the MEMS devices. Therefore, a frequency automatic tracking system is needed to widen the working range of the synchronized resonant accelerometer.

Back to article page