Fig. 1: The topology and principle of the proposed first-order filter. | Microsystems & Nanoengineering

Fig. 1: The topology and principle of the proposed first-order filter.

From: AlN MEMS filters with extremely high bandwidth widening capability

Fig. 1

a MEMS resonator representation and its MBVD fitting model. The admittance response is fitted with MBVD parameters. b The MEMS resonator and the paralleled inductor \(L_0\). Two symmetric transmission zeros are generated. The center frequency is the same as the resonant frequency (\(f_s\)) of the MEMS resonator. c Two three-lumped-element matching networks. Each consists of a series inductor, a shunt inductor, and a shunt capacitor. The two matching networks behave like a wide bandpass filter centered at \(f_s\). d Proposed first-order wideband filter. It is constructed from the combination of the topologies in (b) and (c). The filter is centered at \(f_s\). It features a large bandwidth and two deep TZs. e The frequency response and topology of a ladder-type filter. f The frequency response and topology of a lattice-type filter

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