Fig. 1: Dispersion relation analysis. | Microsystems & Nanoengineering

Fig. 1: Dispersion relation analysis.

From: A tunable ferroelectric based unreleased RF resonator

Fig. 1

a Schematic of a single unit cell. b Dispersion relation showing the vertically confined mode. Modes in the sound cone are free to propagate into the bulk Si substrate and cannot be well confined. c Corresponding displacement field of the localized mode shape of the unit cell FeCAP

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