Fig. 6 | Microsystems & Nanoengineering

Fig. 6

From: 0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

Fig. 6

a Schematic of the resonators in the traditional DRG, DRG with the optimized SLD, and DRG with both optimized SLD and lumped mass configuration. b Comparison of the resonant frequency, QTED and decaying time constant for the three types of DRGs. c Fabrication process of the optimized DRG. d Photograph of the fabricated optimized DRG. e SEM view of the spokes and inner electrodes of the optimized DRG. f SEM view of the lumped masses

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