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Short Bio: Dr., Prof. Wolfgang Osten received the MSc/Diploma in Physics from the Friedrich-Schiller-University Jena in 1979. From 1979 to 1991 he was working at the Academy of Sciences in Berlin in several institutes making investigations in coherent metrology, digital image processing, and machine vision. In 1983, he received a Ph.D. degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. In 1991, he joined the Bremen Institute for Applied Beam Technology (BIAS) to establish and direct the department Optical 3D-Metrology till 2002. From September 2002 till October 2018 he has been a Full Professor at the University of Stuttgart and Director of the Institute for Applied Optics. From 2006 to 2010 he was the Vice-Rector for research and technology transfer at Stuttgart University. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology, and digital image processing. Special attention is directed to the development of resolution-enhanced technologies for the investigation of micro and nanostructures. Wolfgang Osten is fellow of OSA, SPIE, EOS, and SEM, and senior member of IEEE. He is an Honorary Professor of Shenzhen University, China, an Honorary Doctor of the University of Technology of Ilmenau, Germany, the 2011 recipient of the Dennis Gabor Award of the International Society for Optics and Photonics SPIE, the 2018 recipient of the Rudolf Kingslake Medal of the SPIE, the 2019 recipient of the Chandra Vikram Award of the SPIE, and the 2019 recipient of the Emmeth Leith Medal of the International Society OPTICA.