Abstract
We demonstrate here a novel pattern transferring method named “Contact Etching Lithography” onto stretched polymer films by using a solvent-swollen polydimethylsiloxane (PDMS) molds as a template. Furthermore, the transferred patterns can be miniaturized by thermal shrinking of the patterned stretched polymer film.
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Yabu, H., Shimomura, M. Miniaturization of Surface Patterns by Combination of Contact Etching Lithography and Multi-step Shrinking of Stretched Polymer Films. Polym J 40, 534–537 (2008). https://doi.org/10.1295/polymj.PJ2008022
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DOI: https://doi.org/10.1295/polymj.PJ2008022