Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles

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Abstract

This protocol details a method of fabricating off-wafer, multilayered, asymmetric microparticles from the epoxy-based photosensitive polymer SU-8. Also included are methods for altering the surface properties of SU-8 and introducing functional groups for further covalent coupling reactions. These techniques may be used to create microparticles for applications in drug delivery and tissue engineering. Microparticle design, fabrication and surface modification can be completed in 2 d.

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Figure 1: Design of a 3D layered microparticle.
Figure 2: Fabrication of microparticles with a single body layer.
Figure 3: Fabrication of multilayered particles containing additional features.
Figure 4: Microfabricated particles for drug delivery15.

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Correspondence to Tejal A Desai.

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