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Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles

Nature Protocols volume 1, pages 3153–3158 (2006)Cite this article

Abstract

This protocol details a method of fabricating off-wafer, multilayered, asymmetric microparticles from the epoxy-based photosensitive polymer SU-8. Also included are methods for altering the surface properties of SU-8 and introducing functional groups for further covalent coupling reactions. These techniques may be used to create microparticles for applications in drug delivery and tissue engineering. Microparticle design, fabrication and surface modification can be completed in 2 d.

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Figure 1: Design of a 3D layered microparticle.
Figure 2: Fabrication of microparticles with a single body layer.
Figure 3: Fabrication of multilayered particles containing additional features.
Figure 4: Microfabricated particles for drug delivery15.

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Authors and Affiliations

  1. Department of Physiology, University of California at San Francisco, Box 2520, 1700 4th Street, San Francisco, 94143, CA, USA

    Sarah L Tao, Ketul Popat & Tejal A Desai

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  1. Sarah L Tao
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  2. Ketul Popat
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  3. Tejal A Desai
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Correspondence to Tejal A Desai.

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The authors declare no competing financial interests.

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Tao, S., Popat, K. & Desai, T. Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles. Nat Protoc 1, 3153–3158 (2006). https://doi.org/10.1038/nprot.2006.451

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