Abstract
The symmetry of crystalline silicon inhibits a second-order optical nonlinear susceptibility, χ(2), in complementary metal–oxide–semiconductor-compatible silicon photonic platforms. However, χ(2) is required for important processes such as phase-only modulation, second-harmonic generation (SHG) and sum/difference frequency generation. Here, we break the crystalline symmetry by applying direct-current fields across p–i–n junctions in silicon ridge waveguides and induce a χ(2) proportional to the large χ(3) of silicon. The obtained χ(2) is first used to perturb the permittivity (the direct-current Kerr effect) and achieve phase-only modulation. Second, the spatial distribution of χ(2) is altered by periodically patterning p–i–n junctions to quasi-phase-match pump and second-harmonic modes and realize SHG. We measure a maximum SHG efficiency of P2ω/Pω2 = 13 ± 0.5% W−1 at λω = 2.29 µm and with field-induced χ(2) = 41 ± 1.5 pm V–1. We expect such field-induced χ(2) in silicon to lead to a new class of complex integrated devices such as carrier-envelope offset frequency stabilizers, terahertz generators, optical parametric oscillators and chirp-free modulators.
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References
Boyd, R. W. Nonlinear Optics 2nd edn (Academic, 2002).
Corcoran, B. et al. Green light emission in silicon through slow-light enhanced third-harmonic generation in photonic-crystal waveguides. Nat. Photon. 3, 206–210 (2009).
Sederberg, S. & Elezzabi, A. Y. Coherent visible-light-generation enhancement in silicon-based nanoplasmonic waveguides via third-harmonic generation. Phys. Rev. Lett. 144, 227401 (2015).
Dulkeith, E., Vlasov, Y. A., Chen, X., Panoiu, N. C. & Osgood, R. M. Self-phase-modulation in submicron silicon-on-insulator photonic wires. Opt. Express 14, 5524–5534 (2006).
Lin, Q., Painter, O. J. & Agrawal, G. P. Nonlinear optical phenomena in silicon waveguides: modeling and applications. Opt. Express 15, 16604–16644 (2007).
Moss, D. J., van Driel, H. M. & Sipe, J. E. Dispersion in the anisotropy of optical third-harmonic generation in silicon. Opt. Lett. 14, 57–59 (1989).
Cundiff, S. T. & Ye, J. Femtosecond Optical Frequency Comb: Principle, Operation and Applications (Springer Science, 2005).
Cazzanelli, M. et al. Second-harmonic generation in silicon waveguides strained by silicon nitride. Nat. Mater. 11, 148–154 (2012).
Ning, T. et al. Strong second-harmonic generation in silicon nitride films. Appl. Phys. Lett. 100, 161902 (2012).
Levy, J. S., Foster, M. A., Gaeta, A. L. & Lipson, M. Harmonic generation in silicon nitride ring resonators. Opt. Express 19, 11415–11421 (2011).
Bortz, M. L. et al. Noncritical quasi-phase-matched second harmonic generation in an annealed proton-exchanged LiNbO3 waveguide. IEEE J. Quantum Electron. 30, 2953–2960 (1994).
Kuo, P. S., Bravo-Abad, J. & Solomon, G. S. Second-harmonic generation using 4-quasi-phasematching in a GaAs whispering-gallery-mode microcavity. Nat. Commun. 5, 3109 (2014).
Xiong, C. et al. Integrated GaN photonic circuits on silicon (100) for second harmonic generation. Opt. Express 19, 10462–10470 (2011).
Maker, P. D. & Terhune, R. W. Study of optical effects due to an induced polarization third order in the electric field strength. Phys. Rev. 137, A801–A818 (1965).
Lüpke, G. Characterization of semiconductor interfaces by second-harmonic generation. Surf. Sci. Rep. 35, 75–161 (1999).
Baehr-Jones, T. et al. Optical modulation and detection in slotted silicon waveguides. Opt. Express 13, 5216–5226 (2005).
Hochberg, M. et al. Towards a millivolt optical modulator with nano-slot waveguides. Opt. Express 15, 8401–8410 (2007).
Schriever, C. et al. Second-order optical nonlinearity in silicon waveguides: inhomogeneous stress and interfaces. Adv. Opt. Mater. 3, 129–136 (2015).
Sutherland, R. L. Handbook of Nonlinear Optics (CRC, 2003).
Soref, R. A. & Bennett, B. R. Electrooptical effects in silicon. IEEE J. Quantum Electron. 23, 123–129 (1987).
Kashyap, R. Phase-matched periodic electric-field-induced second-harmonic generation in optical fibers. J. Opt. Soc. Am. B 6, 313–328 (1989).
Qasymeh, M., Cada, M. & Ponomarenko, S. A. Quadratic electro-optic Kerr effect: applications to photonic devices. IEEE J. Quantum Electron. 44, 740–746 (2008).
Popović, M. in Integrated Photonics Research Vol. 91 (ed. Sawchuk, A.) paper ITuD4 (OSA Trends in Optics and Photonics, Optical Society of America, 2003).
Timurdogan, E. et al. An ultralow power athermal silicon modulator. Nat. Commun. 5, 4008 (2014).
Azadeh, S. S., Merget, F., Nezhad, M. P. & Witzens, J. On the measurement of the Pockels effect in strained silicon. Opt. Lett. 40, 1877–1880 (2015).
Sharma, R. et al. Characterizing the effects of free carriers in fully etched, dielectric-clad silicon waveguides. Appl. Phys. Lett. 106, 241104 (2015).
Hon, N. K., Soref, R. & Jalali, B. The third-order nonlinear optical coefficients of Si, Ge, and Si1–xGex in the midwave and longwave infrared. J. Appl. Phys. 110, 011301 (2011).
Bristow, A. D., Rotenberg, N. & van Driel, H. M. Two-photon absorption and Kerr coefficients of silicon for 850–2200 nm. Appl. Phys. Lett. 90, 191104 (2007).
Pearl, S., Rotenberg, N. & van Driel, H. M. Three photon absorption in silicon for 2300–3300 nm. Appl. Phys. Lett. 93, 131102 (2008).
Lin, Q. et al. Dispersion of silicon nonlinearities in the near infrared region. Appl. Phys. Lett. 91, 021111 (2007).
Wang, T. et al. Multi-photon absorption and third-order nonlinearity in silicon at mid-infrared wavelengths. Opt. Express 21, 32192–32198 (2013).
Gholami, F. et al. Third-order nonlinearity in silicon beyond 2350 nm. Appl. Phys. Lett. 99, 081102 (2011).
Dinu, M., Quochi, F. & Garcia, H. Third-order nonlinearities in silicon at telecom wavelengths. Appl. Phys. Lett. 82, 2954–2956 (2003).
Szilagyi, A., Hordvik, A. & Schlossberg, H. A quasi-phase-matching technique for efficient optical mixing and frequency doubling. J. Appl. Phys. 47, 2025–2032 (1976).
Telle, H. R. et al. Carrier-envelope offset phase control: a novel concept for absolute optical frequency measurement and ultrashort pulse generation. Appl. Phys. B 69, 327–332 (1999).
Avrutsky, I. & Soref, R. Phase-matched sum frequency generation in strained silicon waveguides using their second-order nonlinear optical susceptibility. Opt. Express 19, 21707–21716 (2011).
Fejer, M. M., Magel, G. A., Jundt, D. H. & Byer, R. L. Quasi-phase-matched second harmonic generation: tuning and tolerances. IEEE J. Quantum Electron. 28, 2631–2654 (1992).
Acknowledgements
This work was supported by the Defense Advanced Research Projects Agency (DARPA) Microsystems Technology Office (MTO) E-PHI (HR0011-12-2-0007) and DODOS (HR0011-15-C-0056) projects. The authors thank programme managers J. Conway and R. Lutwak for support.
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E.T. and M.R.W. conceived the idea for the project. E.T. simulated and designed nonlinear silicon waveguides, laid out the mask, conducted experiments on second-harmonic generators and analysed the results. E.T. and C.V.P. designed the d.c. Kerr MZIs, laid out the mask and analysed the results. C.V.P., M.J.B. and E.T. conducted experiments on d.c. Kerr MZIs. All authors wrote and edited the manuscript. M.R.W. supervised the project.
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Timurdogan, E., Poulton, C., Byrd, M. et al. Electric field-induced second-order nonlinear optical effects in silicon waveguides. Nature Photon 11, 200–206 (2017). https://doi.org/10.1038/nphoton.2017.14
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DOI: https://doi.org/10.1038/nphoton.2017.14
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