Optical modulators encode electrical signals to the optical domain and thus constitute a key element in high-capacity communication links1,2. Ideally, they should feature operation at the highest speed with the least power consumption on the smallest footprint, and at low cost3. Unfortunately, current technologies fall short of these criteria4. Recently, plasmonics has emerged as a solution offering compact and fast devices5,6,7. Yet, practical implementations have turned out to be rather elusive. Here, we introduce a 70 GHz all-plasmonic Mach–Zehnder modulator that fits into a silicon waveguide of 10 μm length. This dramatic reduction in size by more than two orders of magnitude compared with photonic Mach–Zehnder modulators results in a low energy consumption of 25 fJ per bit up to the highest speeds. The technology suggests a cheap co-integration with electronics.
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Beppu, S., Kasai, K., Yoshida, M. & Nakazawa, M. 2048 QAM (66 Gbit/s) single-carrier coherent optical transmission over 150 km with a potential SE of 15.3 bit/s/Hz. Opt. Express 23, 4960–4969 (2015).
Dong, P. et al. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. IEEE J. Sel. Top. Quantum Electron. 20, 150–157 (2014).
Reed, G. T., Mashanovich, G., Gardes, F. Y. & Thomson, D. J. Silicon optical modulators. Nature Photon. 4, 518–526 (2010).
Kinsey, N., Ferrera, M., Shalaev, V. M. & Boltasseva, A. Examining nanophotonics for integrated hybrid systems: a review of plasmonic interconnects and modulators using traditional and alternative materials. J. Opt. Soc. Am. B 32, 121–142 (2015).
Cai, W., White, J. S. & Brongersma, M. L. Compact, high-speed and power-efficient electrooptic plasmonic modulators. Nano Lett. 9, 4403–4411 (2009).
Maier, S. A. et al. Plasmonics—a route to nanoscale optical devices. Adv. Mater. 13, 1501–1505 (2001).
Gramotnev, D. K. & Bozhevolnyi, S. I. Plasmonics beyond the diffraction limit. Nature Photon. 4, 83–91 (2010).
Xu, H. et al. High-speed silicon modulator with band equalization. Opt. Lett. 39, 4839–4842 (2014).
Liao, L. et al. 40 Gbit/s silicon optical modulator for high-speed applications. Electron. Lett. 43, 1196–1197 (2007).
Green, W. M., Rooks, M. J., Sekaric, L. & Vlasov, Y. A. Ultra-compact, low RF power, 10 Gb/s silicon Mach–Zehnder modulator. Opt. Express 15, 17106–17113 (2007).
Thomson, D. J. et al. 50-Gb/s silicon optical modulator. IEEE Photon. Technol. Lett. 24, 234–236 (2012).
Leuthold, J. et al. Silicon–organic hybrid electro-optical devices. IEEE J. Sel. Top. Quantum Electron 19, 114–126 (2013).
Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. Nature 435, 325–327 (2005).
Timurdogan, E. et al. An ultralow power athermal silicon modulator. Nature Commun. 5, 4008 (2014).
Liu, J. et al. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. Nature Photon. 2, 433–437 (2008).
Tang, Y., Peters, J. D. & Bowers, J. E. Over 67 GHz bandwidth hybrid silicon electroabsorption modulator with asymmetric segmented electrode for 1.3 µm transmission. Opt. Express 20, 11529–11535 (2012).
Dong, P., Xie, C., Chen, L., Fontaine, N. K. & Chen, Y.-K. Experimental demonstration of microring quadrature phase-shift keying modulators. Opt. Lett. 37, 1178–1180 (2012).
Pile, D. F. P. et al. Two-dimensionally localized modes of a nanoscale gap plasmon waveguide. Appl. Phys. Lett. 87, 261114 (2005).
Dionne, J. A., Diest, K., Sweatlock, L. A. & Atwater, H. A. PlasMOStor: a metal-oxide-Si field effect plasmonic modulator. Nano Lett. 9, 897–902 (2009).
Knight, M. W., Sobhani, H., Nordlander, P. & Halas, N. J. Photodetection with active optical antennas. Science 332, 702–704 (2011).
Zhu, S., Lo, G. Q. & Kwong, D. L. Theoretical investigation of silicon MOS-type plasmonic slot waveguide based MZI modulators. Opt. Express 18, 27802–27819 (2010).
Melikyan, A. et al. High-speed plasmonic phase modulators. Nature Photon. 8, 229–233 (2014).
Elder, D. L., Benight, S. J., Song, J., Robinson, B. H. & Dalton, L. R. Matrix-assisted poling of monolithic bridge-disubstituted organic NLO chromophores. Chem. Mater. 26, 872–874 (2014).
Sun, S.-S. & Dalton, L. R. Introduction to Organic Electronic and Optoelectronic Materials and Devices (CRC, 2008).
Chang, F., Onohara, K. & Mizuochi, T. Forward error correction for 100 G transport networks. IEEE Commun. Mag. 48, S48–S55 (2010).
Miller, D. A. B. Energy consumption in optical modulators for interconnects. Opt. Express 20, A293–A308 (2012).
Lee, H. W. et al. Nanoscale conducting oxide PlasMOStor. Nano Lett. 14, 6463–6468 (2014).
Han, Z. et al. On-chip detection of radiation guided by dielectric-loaded plasmonic waveguides. Nano Lett. 15, 476–480 (2015).
This work was carried out in the Binnig and Rohrer Nanotechnology Center as well as in the FIRST lab cleanroom facility of ETH Zurich. EU project NAVOLCHI (288869) and the National Science Foundation (grant DMR-1303080) are acknowledged for partial funding of this project.
The authors declare no competing financial interests.
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Haffner, C., Heni, W., Fedoryshyn, Y. et al. All-plasmonic Mach–Zehnder modulator enabling optical high-speed communication at the microscale. Nature Photon 9, 525–528 (2015). https://doi.org/10.1038/nphoton.2015.127
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