Abstract
Large-scale optoelectronics integration is limited by the inability of Si to emit light efficiently1, because Si and the chemically well-matched Ge are indirect-bandgap semiconductors. To overcome this drawback, several routes have been pursued, such as the all-optical Si Raman laser2 and the heterogeneous integration of direct-bandgap III–V lasers on Si3,4,5,6,7. Here, we report lasing in a direct-bandgap group IV system created by alloying Ge with Sn8 without mechanically introducing strain9,10. Strong enhancement of photoluminescence emerging from the direct transition with decreasing temperature is the signature of a fundamental direct-bandgap semiconductor. For T ≤ 90 K, the observation of a threshold in emitted intensity with increasing incident optical power, together with strong linewidth narrowing and a consistent longitudinal cavity mode pattern, highlight unambiguous laser action11. Direct-bandgap group IV materials may thus represent a pathway towards the monolithic integration of Si-photonic circuitry and complementary metal–oxide–semiconductor (CMOS) technology.
Access options
Subscribe to Journal
Get full journal access for 1 year
$187.00
only $15.58 per issue
All prices are NET prices.
VAT will be added later in the checkout.
Rent or Buy article
Get time limited or full article access on ReadCube.
from$8.99
All prices are NET prices.
References
- 1.
Iyer, S. S. & Xie, Y. H. Light emission from silicon. Science 260, 40–46 (1993).
- 2.
Rong, H. et al. An all-silicon Raman laser. Nature 433, 292–294 (2005).
- 3.
Fang, A. W. et al. Electrically pumped hybrid AlGaInAs–silicon evanescent laser. Opt. Express 14, 9203–9210 (2006).
- 4.
Justice, J. et al. Wafer-scale integration of group III–V lasers on silicon using transfer printing of epitaxial layers. Nature Photon. 6, 612–616 (2012).
- 5.
Yang, H. et al. Transfer-printed stacked nanomembrane lasers on silicon. Nature Photon. 6, 617–622 (2012).
- 6.
Liu, H. et al. Long-wavelength InAs/GaAs quantum-dot laser diode monolithically grown on Ge substrate. Nature Photon. 5, 416–419 (2011).
- 7.
Chen, R. et al. Nanolasers grown on silicon. Nature Photon. 5, 170–175 (2011).
- 8.
Chen, R. et al. Demonstration of a Ge/GeSn/Ge quantum-well microdisk resonator on silicon: enabling high-quality Ge(Sn) materials for micro- and nanophotonics. Nano Lett. 14, 37–43 (2014).
- 9.
Sánchez-Pérez, J. R. et al. Direct-bandgap light-emitting germanium in tensilely strained nanomembranes. Proc. Natl Acad. Sci. USA 108, 18893–18898 (2011).
- 10.
Süess, M. J. et al. Analysis of enhanced light emission from highly strained germanium microbridges. Nature Photon. 7, 466–472 (2013).
- 11.
Samuel, I. D. W., Namdas, E. B. & Turnbull, G. A. How to recognize lasing. Nature Photon. 3, 546–549 (2009).
- 12.
Xia, F., Sekaric, L. & Vlasov, Y. Ultracompact optical buffers on a silicon chip. Nature Photon. 1, 65–71 (2007).
- 13.
Assefa, S., Xia, F. & Vlasov, Y. A. Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects. Nature 464, 80–84 (2010).
- 14.
Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. Nature 435, 325–327 (2005).
- 15.
Soref, R. Mid-infrared photonics in silicon and germanium. Nature Photon. 4, 495–497 (2010).
- 16.
Roelkens, G. et al. Silicon-based photonic integration beyond the telecommunication wavelength range. IEEE J. Sel. Top. Quantum Electron. 20, 394–404 (2014).
- 17.
Duan, G.-H. et al. Hybrid III–V on silicon lasers for photonic integrated circuits on silicon. IEEE J. Sel. Top. Quantum Electron. 20, 158–170 (2014).
- 18.
Heck, M. J. R. & Bowers, J. E. Energy efficient and energy proportional optical interconnects for multi-core processors: driving the need for on-chip sources. IEEE J. Sel. Top. Quantum Electron. 20, 1–12 (2014).
- 19.
Liu, J. et al. Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si. Opt. Express 15, 11272–11277 (2007).
- 20.
Liu, J., Sun, X., Camacho-Aguilera, R., Kimerling, L. C. & Michel, J. Ge-on-Si laser operating at room temperature. Opt. Lett. 35, 679–681 (2010).
- 21.
Camacho-Aguilera, R. E. et al. An electrically pumped germanium laser. Opt. Express 20, 11316–11320 (2012).
- 22.
Carroll, L. et al. Direct-gap gain and optical absorption in germanium correlated to the density of photoexcited carriers, doping, and strain. Phys. Rev. Lett. 109, 057402 (2012).
- 23.
De Kersauson, M. et al. Optical gain in single tensile-strained germanium photonic wire. Opt. Express 19, 17925–17934 (2011).
- 24.
Sukhdeo, D. S., Nam, D., Kang, J.-H., Brongersma, M. L. & Saraswat, K. C. Direct bandgap germanium-on-silicon inferred from 5.7% 〈100〉 uniaxial tensile strain. Photon. Res. 2, A8 (2014).
- 25.
Jenkins, D. & Dow, J. Electronic properties of metastable GexSn1–x alloys. Phys. Rev. B 36, 7994–8000 (1987).
- 26.
Lu Low, K., Yang, Y., Han, G., Fan, W. & Yeo, Y. Electronic band structure and effective mass parameters of Ge1–xSnx alloys. J. Appl. Phys. 112, 103715 (2012).
- 27.
Gupta, S., Magyari-Köpe, B., Nishi, Y. & Saraswat, K. C. Achieving direct band gap in germanium through integration of Sn alloying and external strain. J. Appl. Phys. 113, 073707 (2013).
- 28.
He, G. & Atwater, H. A. Interband transitions in SnxGe1–x alloys. Phys. Rev. Lett. 79, 1937–1940 (1997).
- 29.
Grzybowski, G. et al. Next generation of Ge1–ySny (y = 0.01–0.09) alloys grown on Si(100) via Ge3H8 and SnD4: reaction kinetics and tunable emission. Appl. Phys. Lett. 101, 072105 (2012).
- 30.
Chen, R. et al. Increased photoluminescence of strain-reduced, high-Sn composition Ge1–xSnx alloys grown by molecular beam epitaxy. Appl. Phys. Lett. 99, 181125 (2011).
- 31.
Wirths, S. et al. Tensely strained GeSn alloys as optical gain media. Appl. Phys. Lett. 103, 192110 (2013).
- 32.
Wirths, S. et al. Band engineering and growth of tensile strained Ge/(Si)GeSn heterostructures for tunnel field effect transistors. Appl. Phys. Lett. 102, 192103 (2013).
- 33.
Gencarelli, F. et al. Crystalline properties and strain relaxation mechanism of CVD grown GeSn. ECS J. Solid State Sci. Technol. 2, P134–P137 (2013).
- 34.
Gerthsen, D., Biegelsen, D., Ponce, F. A. & Tramontana, J. C. Misfit dislocations in GaAs heteroepitaxy on (001) Si. J. Cryst. Growth 106, 157–165 (1990).
- 35.
Sun, X., Liu, J., Kimerling, L. C. & Michel, J. Direct gap photoluminescence of n-type tensile-strained Ge-on-Si. Appl. Phys. Lett. 95, 011911 (2009).
- 36.
Ryu, M.-Y., Harris, T. R., Yeo, Y. K., Beeler, R. T. & Kouvetakis, J. Temperature-dependent photoluminescence of Ge/Si and Ge1–ySny/Si, indicating possible indirect-to-direct bandgap transition at lower Sn content. Appl. Phys. Lett. 102, 171908 (2013).
- 37.
Geiger, R. et al. Excess carrier lifetimes in Ge layers on Si. Appl. Phys. Lett. 104, 062106 (2014).
- 38.
Shaklee, K. L., Nahory, R. E. & Leheny, R. F. Optical gain in semiconductors. J. Lumin. 7, 284–309 (1973).
Acknowledgements
The authors acknowledge the hospitality of the IR beamline of the SLS, where the photoluminescence experiments were performed. Part of this work was funded by the Swiss National Science Foundation (SNF). This research received funding for CVD growth investigations from the European Community's Seventh Framework Programme (grant agreement no. 619509; project E2SWITCH) and the BMBF project UltraLowPow (16ES0060 K).
Author information
Author notes
- S. Wirths
- & R. Geiger
These authors contributed equally to this work
Affiliations
Peter Grünberg Institute 9 (PGI 9) and JARA-Fundamentals of Future Information Technologies, Forschungszentrum Juelich, 52425 Juelich, Germany
- S. Wirths
- , N. von den Driesch
- , G. Mussler
- , T. Stoica
- , S. Mantl
- , D. Buca
- & D. Grützmacher
Laboratory for Micro- and Nanotechnology (LMN), Paul Scherrer Institut, CH-5232 Villigen, Switzerland
- R. Geiger
- & H. Sigg
Institute for Quantum Electronics, ETH Zürich, CH-8093 Zürich, Switzerland
- R. Geiger
- & J. Faist
Institute of Microwaves and Photonics, School of Electronic and Electrical Engineering, University of Leeds, Leeds LS2 9JT, UK
- Z. Ikonic
Peter Grünberg Institute 5 (PGI 5) and Ernst Ruska-Centrum, Forschungszentrum Juelich, 52425 Juelich, Germany
- M. Luysberg
Dpto. Física Aplicada, E.E.Industrial, Univ. de Vigo, Campus Universitario, 36310 Vigo, Spain
- S. Chiussi
University of Grenoble Alpes, F-38000 Grenoble, France
- J. M. Hartmann
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
- J. M. Hartmann
Authors
Search for S. Wirths in:
Search for R. Geiger in:
Search for N. von den Driesch in:
Search for G. Mussler in:
Search for T. Stoica in:
Search for S. Mantl in:
Search for Z. Ikonic in:
Search for M. Luysberg in:
Search for S. Chiussi in:
Search for J. M. Hartmann in:
Search for H. Sigg in:
Search for J. Faist in:
Search for D. Buca in:
Search for D. Grützmacher in:
Contributions
J.M.H. fabricated the Ge/Si substrates. S.W. and D.B. planned the GeSn epitaxial growth experiments and S.W. and N.v.d.D. fabricated the GeSn/Ge/Si samples. M.L. and S.C. carried out the TEM measurements and analysis. S.W., D.B., G.M., N.v.d.D. and T.S. carried out crystal structure analysis including strain determination via XRD and RBS. Z.I. performed the bandstructure simulations. S.W. and R.G. performed the optical measurements. R.G. and H.S. performed the JDOS modelling, gain analysis and mode simulations. R.G. processed the GeSn cavities. S.M., J.F., D.B., H.S. and D.G. supervised the experiments and coordinated data interpretation. S.W., H.S., R.G. and D.B. wrote the paper. All authors discussed the results and commented on the manuscript.
Competing interests
The authors declare no competing financial interests.
Corresponding authors
Supplementary information
PDF files
- 1.
Supplementary information
Supplementary information
Rights and permissions
To obtain permission to re-use content from this article visit RightsLink.
About this article
Further reading
-
Influence of Sn precursors on Ge1−x Sn x growth using metal-organic chemical vapor deposition
Japanese Journal of Applied Physics (2019)
-
Strain engineering of transverse electric and transverse magnetic mode of material gain in GeSn/SiGeSn quantum wells
Scientific Reports (2019)
-
Highly Enhanced SWIR Image Sensors Based on Ge1–xSnx–Graphene Heterostructure Photodetector
ACS Photonics (2019)
-
Extraction of eight-band k ⋅ p parameters from empirical pseudopotentials for GeSn
Journal of Applied Physics (2019)
-
Analysis of germanium waveguide laser performance under external phonon injection
Optics Express (2019)