Abstract
Graphene-based photonic devices, such as ultrafast photodetectors, optical modulators and tunable surface plasmon polariton devices, have experienced rapid development in recent years1,2,3,4,5,6 because they benefit greatly from graphene's strong field-controlled optical response7,8. Here, we demonstrate a graphene/silicon-heterostructure photodiode formed by integrating graphene onto a silicon optical waveguide on a silicon-on-insulator (SOI) with a near to mid-infrared operational range. The waveguide enables absorption of evanescent light that propagates parallel to the graphene sheet, which results in a responsivity as high as 0.13 A W−1 at a 1.5 V bias for 2.75 µm light at room temperature. A photocurrent dependence on bias polarity was observed and attributed to two distinct mechanisms for optical absorption, that is, direct and indirect transitions in graphene at 1.55 µm and 2.75 µm, respectively. Our result demonstrates the use of in-plane absorption in a graphene-monolayer structure and the feasibility of exploiting indirect transitions in graphene/silicon-heterostructure waveguides for mid-infrared detection.
This is a preview of subscription content, access via your institution
Relevant articles
Open Access articles citing this article.
-
Van der Waals interfaces in multilayer junctions for ultraviolet photodetection
npj 2D Materials and Applications Open Access 08 September 2022
-
Chip-integrated van der Waals PN heterojunction photodetector with low dark current and high responsivity
Light: Science & Applications Open Access 20 April 2022
-
High-performance photodetector based on an interface engineering-assisted graphene/silicon Schottky junction
Microsystems & Nanoengineering Open Access 07 January 2022
Access options
Subscribe to this journal
Receive 12 print issues and online access
$209.00 per year
only $17.42 per issue
Rent or buy this article
Get just this article for as long as you need it
$39.95
Prices may be subject to local taxes which are calculated during checkout



References
Xia, F., Mueller, T., Lin, Y.-M., Valdes-Garcia, A. & Avouris, P. Ultrafast graphene photodetector. Nature Nanotech. 4, 839–843 (2009).
Ju, L. et al. Graphene plasmonics for tunable terahertz metamaterials. Nature Nanotech. 6, 630–634 (2011).
Liu, M. et al. A graphene-based broadband optical modulator. Nature 474, 64–67 (2011).
Chen, J. et al. Optical nano-imaging of gate-tunable graphene plasmons. Nature 487, 77–81 (2012).
Fei, Z. et al. Gate-tuning of graphene plasmons revealed by infrared nano-imaging. Nature 487, 82–85 (2012).
Yan, H. et al. Tunable infrared plasmonic devices using graphene/insulator stacks. Nature Nanotech. 7, 330–334 (2012).
Li, Z. Q. et al. Dirac charge dynamics in graphene by infrared spectroscopy. Nature Phys. 4, 532–535 (2008).
Wang, F. et al. Gate-variable optical transitions in graphene. Science 320, 206–209 (2008).
Geim, A. K. & Novoselov, K. S. The rise of graphene. Nature Mater. 6, 183–191 (2007).
Mak, K. F. et al. Measurement of the optical conductivity of graphene. Phys. Rev. Lett. 101, 196405 (2008).
Hendry, E., Hale, P. J., Moger, J., Savchenko, A. K. & Mikhailov, S. A. Coherent nonlinear optical response of graphene. Phys. Rev. Lett. 105, 097401 (2010).
Liu, X. et al. Bridging the mid-infrared-to-telecom gap with silicon nanophotonic spectral translation. Nature Photon. 6, 667–671 (2012).
Jalali, B. et al. Prospects for silicon mid-IR Raman lasers. IEEE J. Sel. Top. Quant. 12, 1618–1627 (2006).
Keuleyan, S., Lhuillier, E., Brajuskovic, V. & Guyot-Sionnest, P. Mid-infrared HgTe colloidal quantum dot photodetectors. Nature Photon. 5, 489–493 (2011).
Rogalski, A. HgCdTe infrared detector material: history, status and outlook. Rep. Prog. Phys. 68, 2267–2336 (2005).
Lackner, D. et al. Growth of InAsSb/InAs MQWs on GaSb for mid-IR photodetector applications. J. Cryst. Growth 311, 3563–3567 (2009).
Stiff-Roberts, A. D. Quantum-dot infrared photodetectors: a review. J. Nanophoton. 3, 031607 (2009).
Lee, E. J. H., Balasubramanian, K., Weitz, R. T., Burghard, M. & Kern, K. Contact and edge effects in graphene devices. Nature Nanotech. 3, 486–490 (2008).
Park, J., Ahn, Y. H. & Ruiz-Vargas, C. Imaging of photocurrent generation and collection in single-layer graphene. Nano Lett. 9, 1742–1746 (2009).
Mueller, T., Xia, F. & Avouris, P. Graphene photodetectors for high-speed optical communications. Nature Photon. 4, 297–301 (2010).
Nair, R. R. et al. Fine structure constant defines visual transparency of graphene. Science 320, 1308 (2008).
Konstantatos, G. et al. Hybrid graphene–quantum dot phototransistors with ultrahigh gain. Nature Nanotech. 7, 363–368 (2012).
Engel, M. et al. Light–matter interaction in a microcavity-controlled graphene transistor. Nature Commun. 3, 906 (2012).
Furchi, M. et al. Microcavity-integrated graphene photodetector. Nano Lett. 12, 2773–2777 (2012).
Echtermeyer, T. J. et al. Strong plasmonic enhancement of photovoltage in graphene. Nature Commun. 2, 458 (2011).
Gu, T. et al. Regenerative oscillation and four-wave mixing in graphene optoelectronics. Nature Photon. 6, 554–559 (2012).
Bao, Q. et al. Broadband graphene polarizer. Nature Photon. 5, 411–415 (2011).
Koester, S. J. & Li, M. High-speed waveguide-coupled graphene-on-graphene optical modulators. Appl. Phys. Lett. 100, 171107 (2012).
Li, H., Anugrah, Y., Koester, S. J. & Li, M. Optical absorption in graphene integrated on silicon waveguides. Appl. Phys. Lett. 101, 111110 (2012).
Pospischil, A. et al. CMOS-integrated graphene photodetector covering all optical communication bands. Nature Photon. http://dx.doi.org/10.1038/nphoton.2013.240 (15 September 2013).
Das, A. et al. Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor. Nature Nanotech. 3, 210–215 (2008).
Yang, H. et al. Graphene barristor, a triode device with a gate-controlled Schottky barrier. Science 336, 1140–1143 (2012).
An, Y., Behnam, A., Pop, E. & Ural, A. Metal–semiconductor–metal photodetectors based on graphene/p-type silicon Schottky junctions. Appl. Phys. Lett. 102, 013110 (2013).
Cheng, Z., Chen, X., Wong, C. Y., Xu, K. & Tsang, H. K. Mid-infrared suspended membrane waveguide and ring resonator on silicon-on-insulator. IEEE Photon. J. 4, 1510–1519 (2012).
Ferrari, A. C. et al. Raman spectrum of graphene and graphene layers. Phys. Rev. Lett. 97, 187401 (2006).
Wang, X. M., Xu, J. B., Wang, C. L., Du, J. & Xie, W. G. High-performance graphene devices on SiO2/Si substrate modified by highly ordered self-assembled monolayers. Adv. Mater. 23, 2464–2468 (2011).
Acknowledgements
This work was supported by the Hong Kong Research Grants Council (RGC) research grants (Grant Nos CUHK1/CRF/12G, CUHK4179/10E, SEG-CUHK01, CUHK4165/12E and AoE/P-02/12), and the National Natural Science Foundation of China (NSFC)/RGC Joint Research Scheme (N_CUHK405/12). J.-B.X. thanks the NSFC for support, particularly via Grant Nos 60990314, 60928009 and 61229401. Z.Z.C. thanks for the Hong Kong RGC PhD Fellowship.
Author information
Authors and Affiliations
Contributions
X.W. conceived the project. X.W. and Z.C. contributed equally to conduction of the experiments. K.X. helped with the sample preparation. X.W. and Z.C. wrote the manuscript. J.-B.X. and H.K.T. supervised the project. All authors discussed the results and commented on the paper.
Corresponding authors
Ethics declarations
Competing interests
The authors declare no competing financial interests.
Supplementary information
Supplementary information
Supplementary information (PDF 1682 kb)
Rights and permissions
About this article
Cite this article
Wang, X., Cheng, Z., Xu, K. et al. High-responsivity graphene/silicon-heterostructure waveguide photodetectors. Nature Photon 7, 888–891 (2013). https://doi.org/10.1038/nphoton.2013.241
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/nphoton.2013.241
This article is cited by
-
Graphene oxide for photonics, electronics and optoelectronics
Nature Reviews Chemistry (2023)
-
Recent Progress of Gr/Si Schottky Photodetectors
Electronic Materials Letters (2023)
-
Chip-integrated van der Waals PN heterojunction photodetector with low dark current and high responsivity
Light: Science & Applications (2022)
-
Van der Waals interfaces in multilayer junctions for ultraviolet photodetection
npj 2D Materials and Applications (2022)
-
High-performance photodetector based on an interface engineering-assisted graphene/silicon Schottky junction
Microsystems & Nanoengineering (2022)