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Extreme-ultraviolet sources

Higher harmonics with plasmonics

The use of a custom-shaped hollow metallic cone can dramatically improve the efficiency of converting infrared to extreme-ultraviolet light, bringing the prospect of a compact laser-like source for next-generation lithography and imaging in the biological 'water window' a step closer to reality.

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Figure 1: Schematic of the elliptic-conical waveguide, showing how SPPs gather at the exit aperture.

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Correspondence to John Costello.

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Costello, J. Higher harmonics with plasmonics. Nature Photon 5, 646–647 (2011). https://doi.org/10.1038/nphoton.2011.266

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