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Pushing the limits

Nature Photonics volume 4, page 30 (2010) | Download Citation

John Warlaumont, vice president of advanced technologies at SEMATECH, a consortium of the world's chip manufacturers, talks to Nadya Anscombe about the future of optical lithography.

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Published

DOI

https://doi.org/10.1038/nphoton.2009.255

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