Integrated multiple-wavelength laser sources, critical for important applications such as high-precision broadband sensing and spectroscopy1, molecular fingerprinting2, optical clocks3 and attosecond physics4, have recently been demonstrated in silica and single-crystal microtoroid resonators using parametric gain2,5,6. However, for applications in telecommunications7 and optical interconnects8, analogous devices compatible with a fully integrated platform9 do not yet exist. Here, we report a fully integrated, CMOS-compatible, multiple-wavelength source. We achieve optical ‘hyper-parametric’ oscillation in a high-index silica-glass microring resonator10 with a differential slope efficiency above threshold of 7.4% for a single oscillating mode, a continuous-wave threshold power as low as 54 mW, and a controllable range of frequency spacing from 200 GHz to more than 6 THz. The low loss, design flexibility and CMOS compatibility of this device will enable the creation of multiple-wavelength sources for telecommunications, computing, sensing, metrology and other areas.
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Thorpe, M. J., Moll, K. D., Jones, R. J., Safdi, B. & Ye, J. Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection. Science 311, 1595–1599 (2006).
Diddams, S. A., Hollberg, L. & Mbele, V. Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb. Nature 445, 627–630 (2007).
Diddams, S. A. et al. An optical clock based on a single trapped 199Hg+ ion. Science 293, 825–828 (2001).
Goulielmakis, E. et al. Attosecond control and measurement: lightwave electronics. Science 317, 769–775 (2007).
Del'Haye, P., Arcizet, O., Schliesser, A., Holzwarth, R. & Kippenberg, T. J. Full stabilization of a microresonator-based optical frequency comb. Phys. Rev. Lett. 101, 053903 (2008).
Grudinin, I. S., Yu, N. & Maleki, L. Generation of optical frequency combs with a CaF2 resonator. Opt. Lett. 34, 878–880 (2009).
Alduino, A. & Paniccia, M. Interconnects: wiring electronics with light. Nature Photon. 1, 153–155 (2007).
Miller, D. A. B. Optical interconnects to silicon. IEEE J. Sel. Top. Quant. Electron. 6, 1312–1317 (2000).
Izhaky, N. et al. Development of CMOS-compatible integrated silicon photonics devices. IEEE J. Sel. Top. Quant. Electron. 12, 1688–1698 (2006).
Ferrera, M. et al. Low-power continuous-wave nonlinear optics in doped silica glass integrated waveguide structures. Nature Photon. 2, 737–740 (2008).
Holzwarth, R. et al. Optical frequency synthesizer for precision spectroscopy. Phys. Rev. Lett. 85, 2264–2267 (2000).
Diddams, S. A. et al. Direct link between microwave and optical frequencies with a 300 THz femtosecond laser comb. Phys. Rev. Lett. 84, 5102–5105 (2000).
Kippenberg, T. J., Spillane, S. M. & Vahala, K. J. Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity. Phys. Rev. Lett. 93, 083904 (2004).
Spillane, S. M., Kippenberg, T. J. & Vahala, K. J. Ultralow-threshold Raman laser using a spherical dielectric microcavity. Nature 415, 621–623 (2002).
Carmon, T. & Vahala, K. J. Visible continuous emission from a silica microphotonic device by third-harmonic generation. Nature Phys. 3, 430–435 (2007).
Agha, I. H., Okawachi, Y., Foster, M. A., Sharping, J. E. & Gaeta, A. L. Four-wave-mixing parametric oscillations in dispersion-compensated high-Q silica microspheres. Phys. Rev. A 76, 043837 (2007).
Eggleton, B. J., Radic, S. & Moss, D. J. Nonlinear Optics in Communications: From Crippling Impairment to Ultrafast Tools Ch. 20 (Academic Press, 2008).
Jalali, B. & Fathpour, S. Silicon photonics. J. Lightwave Technol. 24, 4600–4615 (2006).
Boyraz, O. & Jalali, B. Demonstration of a silicon Raman laser. Opt. Express 12, 5269–5273 (2004).
Rong, H. et al. An all-silicon Raman laser. Nature 433, 292–294 (2005).
Turner, A. C., Foster, M. A., Gaeta, A. L. & Lipson, M. Ultra-low power parametric frequency conversion in a silicon microring resonator. Opt. Express 16, 4881–4887 (2008).
Duchesne, D. et al. Efficient self-phase modulation in low loss, high index doped silica glass integrated waveguides. Opt. Express 17, 1865–1870 (2009).
Gondarenko, A., Levy, J. S. & Lipson, M. High confinement micron-scale silicon nitride high Q ring resonator. Opt. Express 17, 11366–11370 (2009).
Ikeda, K. et al. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides. Opt. Express 16, 12987–12994 (2008).
Levy, J. S. et al. Conference on Lasers and Electro-Optics (CLEO) Postdeadline Paper CPDPB8, Baltimore, MD, May (2009).
Ferrera, M. et al. Low power four-wave mixing in an integrated, microring resonator with Q = 1.2 million. Opt. Express 17, 14098–14103 (2009).
Luan, F. et al. Dispersion engineered As2S3 planar waveguides for broadband four-wave mixing based wavelength conversion of 40 Gb/s signals. Opt. Express 17, 3514–3520 (2009).
Weiner, A. M. Femtosecond pulse shaping using spatial light modulators. Rev. Sci. Instrum. 71, 1929–1960 (2000).
Murphy, M. T. et al. High-precision wavelength calibration with laser frequency combs. Mon. Not. R. Astron. Soc. 380, 839–847 (2007).
This work was supported by the Australian Research Council (ARC) Centres of Excellence program, the FQRNT (Le Fonds Québécois de la Recherche sur la Nature et les Technologies), the Natural Sciences and Engineering Research Council of Canada (NSERC), NSERC Strategic Projects and the Institut National de la Recherche Scientifique (INRS). L.R. would like to acknowledge a Marie Curie Outgoing International Fellowship (contract no. 040514). The authors are also grateful to M. Liscidini, M. Lamont and J. Sipe for useful discussions.
The authors declare no competing financial interests.
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Razzari, L., Duchesne, D., Ferrera, M. et al. CMOS-compatible integrated optical hyper-parametric oscillator. Nature Photon 4, 41–45 (2010). https://doi.org/10.1038/nphoton.2009.236
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