State-of-the-art sensors use active electronics to detect and discriminate light1,2,3, sound4,5, vibration6,7 and other signals8,9. They consume power constantly, even when there is no relevant data to be detected, which limits their lifetime and results in high costs of deployment and maintenance for unattended sensor networks. Here we propose a device concept that fundamentally breaks this paradigm—the sensors remain dormant with near-zero power consumption until awakened by a specific physical signature associated with an event of interest. In particular, we demonstrate infrared digitizing sensors that consist of plasmonically enhanced micromechanical photoswitches (PMPs) that selectively harvest the impinging electromagnetic energy in design-defined spectral bands of interest, and use it to create mechanically a conducting channel between two electrical contacts, without the need for any additional power source. Our zero-power digitizing sensor prototypes produce a digitized output bit (that is, a large and sharp off-to-on state transition with an on/off conductance ratio >1012 and subthreshold slope >9 dec nW–1) when exposed to infrared radiation in a specific narrow spectral band (∼900 nm bandwidth in the mid-infrared) with the intensity above a power threshold of only ∼500 nW, which is not achievable with any existing photoswitch technologies.
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Koppens, F. et al. Photodetectors based on graphene, other two-dimensional materials and hybrid systems. Nat. Nanotech. 9, 780–793 (2014).
Hui, Y., Gomez-Diaz, J. S., Qian, Z., Alù, A. & Rinaldi, M. Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing. Nat. Commun. 7, 11249 (2016).
Qian, Z. et al. Graphene–aluminum nitride NEMS resonant infrared detector. Microsyst. Nanoeng. 2, 16026 (2016).
Royer, M., Holmen, J., Wurm, M., Aadland, O. & Glenn, M. ZnO on Si integrated acoustic sensor. Sens. Actuators 4, 357–362 (1983).
Lang, C., Fang, J., Shao, H., Ding, X. & Lin, T. High-sensitivity acoustic sensors from nanofibre webs. Nat. Commun. 7, 11108 (2016).
Bernstein, J., Miller, R., Kelley, W. & Ward, P. Low-noise MEMS vibration sensor for geophysical applications. J. Microelectromech. Syst. 8, 433–438 (1999).
Middlemiss, R. et al. Measurement of the Earth tides with a MEMS gravimeter. Nature 531, 614–617 (2016).
Zuniga, C., Rinaldi, M., Khamis, S. M., Johnson, A. & Piazza, G. Nanoenabled microelectromechanical sensor for volatile organic chemical detection. Appl. Phys. Lett. 94, 223122 (2009).
Gong, S. et al. A wearable and highly sensitive pressure sensor with ultrathin gold nanowires. Nat. Commun. 5, 3132 (2014).
Baeg, K. J., Binda, M., Natali, D., Caironi, M. & Noh, Y. Y. Organic light detectors: photodiodes and phototransistors. Adv. Mater. 25, 4267–4295 (2013).
Noh, Y.-Y. et al. High-photosensitivity p-channel organic phototransistors based on a biphenyl end-capped fused bithiophene oligomer. Appl. Phys. Lett. 86, 043501 (2005).
Shankar, M., Burchett, J. B., Hao, Q., Guenther, B. D. & Brady, D. J. Human-tracking systems using pyroelectric infrared detectors. Opt. Eng. 45, 106401 (2006).
Texas Instruments. Low-Power PIR Motion Detector with Sub-1 GHz Wireless Connectivity Enabling 10-Year Coin Cell Battery Life (Dallas, 2016) www.ti.com/lit/ug/tiduau1b/tiduau1b.pdf
Chen, C., Yi, X., Zhao, X. & Xiong, B. Characterization of VO2 based uncooled microbolometer linear array. Sens. Actuators A 90, 212–214 (2001).
Rogalski, A. HgCdTe infrared detector material: history, status and outlook. Rep. Prog. Phys. 68, 2267–2336 (2005).
Robert, P. et al. Low power consumption infrared thermal sensor array for smart detection and thermal imaging applications. Proc. IRS² 2013, 24–27 (2013).
Zavracky, P. M., Majumder, S. & McGruer, N. E. Micromechanical switches fabricated using nickel surface micromachining. J. Microelectromech. Syst. 6, 3–9 (1997).
Loh, O. Y. & Espinosa, H. D. Nanoelectromechanical contact switches. Nat. Nanotech. 7, 283–295 (2012).
Feng, X., Matheny, M., Zorman, C. A., Mehregany, M. & Roukes, M. Low voltage nanoelectromechanical switches based on silicon carbide nanowires. Nano Lett. 10, 2891–2896 (2010).
Lee, J. O. et al. A sub-1-volt nanoelectromechanical switching device. Nat. Nanotech. 8, 36–40 (2013).
Zaghloul, U. & Piazza, G. Sub-1-volt piezoelectric nanoelectromechanical relays with millivolt switching capability. IEEE Electron Device Lett. 35, 669–671 (2014).
Shavezipur, M. et al. Partitioning electrostatic and mechanical domains in nanoelectromechanical relays. J. Microelectromech. Syst. 24, 592–598 (2015).
Datskos, P. G., Rajic, S. & Datskou, I. Photoinduced and thermal stress in silicon microcantilevers. Appl. Phys. Lett. 73, 2319–2321 (1998).
Datskos, P., Lavrik, N. & Rajic, S. Performance of uncooled microcantilever thermal detectors. Rev. Sci. Instrum. 75, 1134–1148 (2004).
Jones, C. et al. MEMS thermal imager with optical readout. Sens. Actuators A Phys. 155, 47–57 (2009).
Ma, D., Garrett, J. L. & Munday, J. N. Quantitative measurement of radiation pressure on a microcantilever in ambient environment. Appl. Phys. Lett. 106, 091107 (2015).
Engheta, N. Antennas and Propagation Soc. Int. Symp. 2002 392–395 (IEEE, 2002).
Watts, C. M., Liu, X. & Padilla, W. J. Metamaterial electromagnetic wave absorbers. Adv. Mater. 24, OP98–OP120 (2012).
Cui, Y. et al. Plasmonic and metamaterial structures as electromagnetic absorbers. Laser Photon. Rev. 8, 495–520 (2014).
Corbeil, J., Lavrik, N., Rajic, S. & Datskos, P. ‘Self-leveling’ uncooled microcantilever thermal detector. Appl. Phys. Lett. 81, 1306–1308 (2002).
Nielsen, M. G., Gramotnev, D. K., Pors, A., Albrektsen, O. & Bozhevolnyi, S. I. Continuous layer gap plasmon resonators. Opt. Express 19, 19310–19322 (2011).
Senturia, S. D. Microsystem Design Ch. 6.4 (Springer Science & Business Media, 2007).
Timoshenko, S. Analysis of bi-metal thermostats. JOSA 11, 233–255 (1925).
Lobontiu, N. & Garcia, E. Mechanics of Microelectromechanical Systems Ch. 3 (Springer Science & Business Media, 2004).
The authors thank R. Olsson, R. Bogoslovov and Y. Hui for valuable discussions and the staff of the George J. Kostas Nanoscale Technology and Manufacturing Research Center at Northeastern University and the Center for Nanoscale Systems at Harvard University where the devices were fabricated. This work was supported by DARPA NZERO Program contract no. HR0011-15-2-0048 and partially supported by NSF CAREER award no. ECCS-1350114.
A patent application has been filed under the Patent Cooperation Treaty (PCT), application no. PCT/US/16/48083.
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Qian, Z., Kang, S., Rajaram, V. et al. Zero-power infrared digitizers based on plasmonically enhanced micromechanical photoswitches. Nature Nanotech 12, 969–973 (2017). https://doi.org/10.1038/nnano.2017.147
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