Abstract
The coherent control of quantum-entangled states of trapped ions1 has led to significant advances in quantum information2, quantum simulation3, quantum metrology4,5 and laboratory tests of quantum mechanics6 and relativity7. All of the basic requirements for processing quantum information with arrays of ion-based quantum bits (qubits) have been proven in principle8. However, so far, no more than 14 ion-based qubits have been entangled with the ion-trap approach9, so there is a clear need for arrays of ion traps that can handle a much larger number of qubits10. Traps consisting of a two-dimensional electrode array11 have undergone significant development, but three-dimensional trap geometries can create a superior confining potential. However, existing three-dimensional approaches, as used in the most advanced experiments with trap arrays8,12, cannot be scaled up to handle greatly increased numbers of ions. Here, we report a monolithic three-dimensional ion microtrap array etched from a silica-on-silicon wafer using conventional semiconductor fabrication technology. We have confined individual 88Sr+ ions and strings of up to 14 ions in a single segment of the array. We have measured motional frequencies, ion heating rates and storage times. Our results demonstrate that it should be possible to handle several tens of ion-based qubits with this approach.
This is a preview of subscription content, access via your institution
Relevant articles
Open Access articles citing this article.
-
A review of silicon microfabricated ion traps for quantum information processing
Micro and Nano Systems Letters Open Access 23 April 2015
Access options
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Rent or buy this article
Prices vary by article type
from$1.95
to$39.95
Prices may be subject to local taxes which are calculated during checkout




References
Blatt, R. & Wineland, D. Entangled states of trapped atomic ions. Nature 453, 1008–1015 (2008).
Ladd, T. D. et al. Quantum computers. Nature 464, 45–53 (2010).
Blatt, R. & Roos, C. F. Quantum simulations with trapped ions. Nature Phys. 8, 277–284 (2012).
Leibfried, D. et al. Toward Heisenberg-limited spectroscopy with multiparticle entangled states. Science 304, 1476–1478 (2004).
Roos, C. F., Chwalla, M., Kim, K., Riebe, M. & Blatt, R. ‘Designer atoms’ for quantum metrology. Nature 443, 316–319 (2006).
Jost, J. D. et al. Entangled mechanical oscillators. Nature 459, 683–686 (2009).
Chou, C. W., Hume, D. B., Rosenband, T. & Wineland, D. J. Optical clocks and relativity. Science 329, 1630–1633 (2010).
Home, J. P. et al. Complete methods set for scalable ion trap quantum information processing. Science 325, 1227–1230 (2009).
Monz, T. et al. 14-Qubit entanglement: creation and coherence. Phys. Rev. Lett. 106, 130506 (2011).
Kielpinski, D., Monroe, C. & Wineland, D. J. Architecture for a large-scale ion-trap quantum computer. Nature 417, 709–711 (2002).
Seidelin, S. et al. Microfabricated surface-electrode ion trap for scalable quantum information processing. Phys. Rev. Lett. 96, 253003 (2006).
Hanneke, D. et al. Realization of a programmable two-qubit quantum processor. Nature Phys. 6, 13–16 (2010).
Barrett, M. D. et al. Deterministic quantum teleportation of atomic qubits. Nature 429, 737–739 (2004).
Blakestad, R. B. et al. Near-ground-state transport of trapped-ion qubits through a multidimensional array. Phys. Rev. A 84, 032314 (2011).
Leibfried, D., Blatt, R., Monroe, C. & Wineland, D. Quantum dynamics of single trapped ions. Rev. Mod. Phys. 75, 281–324 (2003).
Brownnutt, M., Wilpers, G., Gill, P., Thompson, R. C. & Sinclair, A. G. Monolithic microfabricated ion trap chip design for scaleable quantum processors. New J. Phys. 8, 232 (2006).
Madsen, M. J., Hensinger, W. K., Stick, D., Rabchuk, J. A. & Monroe, C. Planar ion trap geometry for microfabrication. Appl. Phys. B 78, 639–651 (2004).
Amini, J. M., Britton, J., Leibfried, D. & Wineland, D. J. in Atom Chips (eds Reichel, J. & Vuletić, V.) Ch. 13 (Wiley, 2011).
Stick, D. et al. Ion trap in a semiconductor chip. Nature Phys. 2, 36–39 (2006).
Britton, J. et al. Scalable arrays of rf Paul traps in degenerate Si. Appl. Phys. Lett. 95, 173102 (2009).
Brownnutt, M. et al. Controlled photoionization loading of 88Sr+ for precision ion-trap experiments. Appl. Phys. B 87, 411–415 (2007).
Allcock, D. T. C. et al. Heating rate and electrode charging measurements in a scalable, microfabricated, surface-electrode ion trap. Appl. Phys. B 107, 913–919 (2012).
Berkeland, D. J., Miller, J. D., Bergquist, J. C., Itano, W. M. & Wineland, D. J. Minimization of ion micromotion in a Pauli trap. J. Appl. Phys. 83, 5025–5033 (1998).
Hughes, M. D., Lekitsch, B., Broersma, J. A. & Hensinger, W. K. Microfabricated ion traps. Contemp. Phys. 52, 505–529 (2011).
Epstein, R. J. et al. Simplified motional heating rate measurements of trapped ions. Phys. Rev. A 76, 033411 (2007).
Deslauriers, L. et al. Scaling and suppression of anomalous heating in ion traps. Phys. Rev. Lett. 97, 103007 (2006).
Labaziewicz, J. et al. Suppression of heating rates in cryogenic surface-electrode ion traps. Phys. Rev. Lett. 100, 013001 (2008).
Letchumanan, V., Gill, P., Riis, E. & Sinclair, A. G. Optical Ramsey spectroscopy of a single trapped 88Sr+ ion. Phys. Rev. A 70, 033419 (2004).
Benhelm, J., Kirchmair, G., Roos, C. F. & Blatt, R. Towards fault-tolerant quantum computing with trapped ions. Nature Phys. 4, 463–466 (2008).
Brown, K. R. et al. Single-qubit-gate error below 10−4 in a trapped ion. Phys. Rev. A 84, 030303 (2011).
DiVincenzo, D. P. The physical implementation of quantum computation. Fortschr. Phys. 48, 771–783 (2000).
Acknowledgements
The authors thank F. Schmidt-Kaler, C. Wunderlich, W. Hänsel, R. Blatt, M. Drewsen, D. Lucas, D Allcock and D. Moehring for useful discussions. The authors also acknowledge support from the EU STREP project MICROTRAP (IST-517675), the EU collaborative project SCALA (IST-015714) and the Pathfinder Metrology Programme of the UK National Measurement Office.
Author information
Authors and Affiliations
Contributions
P.S. fabricated the ion trap chips. G.W., P.G. and A.G.S. contributed to the experimental set-up. G.W. and A.G.S. performed the measurements. A.G.S. wrote the manuscript, with contributions from the other authors.
Corresponding author
Ethics declarations
Competing interests
The authors declare no competing financial interests.
Supplementary information
Supplementary information
Supplementary information (PDF 363 kb)
Rights and permissions
About this article
Cite this article
Wilpers, G., See, P., Gill, P. et al. A monolithic array of three-dimensional ion traps fabricated with conventional semiconductor technology. Nature Nanotech 7, 572–576 (2012). https://doi.org/10.1038/nnano.2012.126
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/nnano.2012.126
This article is cited by
-
The expanding role of National Metrology Institutes in the quantum era
Nature Physics (2022)
-
Engineering of microfabricated ion traps and integration of advanced on-chip features
Nature Reviews Physics (2020)
-
Improved Miniaturized Linear Ion Trap Mass Spectrometer Using Lithographically Patterned Plates and Tapered Ejection Slit
Journal of the American Society for Mass Spectrometry (2018)
-
Experimental Observation of the Effects of Translational and Rotational Electrode Misalignment on a Planar Linear Ion Trap Mass Spectrometer
Journal of the American Society for Mass Spectrometry (2018)
-
Intensity stabilisation of optical pulse sequences for coherent control of laser-driven qubits
Applied Physics B (2018)