Abstract
Phase-change memory technology relies on the electrical and optical properties of certain materials changing substantially when the atomic structure of the material is altered by heating1 or some other excitation process2,3,4,5. For example, switching the composite Ge2Sb2Te5 (GST) alloy from its covalently bonded amorphous phase to its resonantly bonded metastable cubic crystalline phase decreases the resistivity by three orders of magnitude6, and also increases reflectivity across the visible spectrum7,8. Moreover, phase-change memory based on GST is scalable9,10,11, and is therefore a candidate to replace Flash memory for non-volatile data storage applications. The energy needed to switch between the two phases depends on the intrinsic properties of the phase-change material and the device architecture; this energy is usually supplied by laser or electrical pulses1,6. The switching energy for GST can be reduced by limiting the movement of the atoms to a single dimension, thus substantially reducing the entropic losses associated with the phase-change process12,13. In particular, aligning the c-axis of a hexagonal Sb2Te3 layer and the 〈111〉 direction of a cubic GeTe layer in a superlattice structure creates a material in which Ge atoms can switch between octahedral sites and lower-coordination sites at the interface of the superlattice layers. Here we demonstrate GeTe/Sb2Te3 interfacial phase-change memory (IPCM) data storage devices with reduced switching energies, improved write-erase cycle lifetimes and faster switching speeds.
This is a preview of subscription content, access via your institution
Access options
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
References
Wuttig, M. & Yamada, N. Phase-change materials for rewriteable data storage. Nature Mater. 6, 824–832 (2007).
Karpov, I. V., Mitra, M., Kau, D., Spadini, G., Kryukov, Y. A., & Karpov, V. G. Evidence of field induced nucleation in phase change memory. Appl. Phys. Lett. 92, 173501 (2008).
Fons, P. et al. Photoassisted amorphization of the phase-change memory alloy Ge2Sb2Te5 . Phys. Rev. B 82, 041203 (2010).
Makino, K., Tominaga, J. & Hase, M. Ultrafast optical manipulation of atomic arrangements in chalcogenide alloy memory materials. Opt. Express 19, 1260–1270 (2011).
Kolobov, A. V., Krbal, M., Fons, P., Tominaga, J., & Uruga, T. Distortion-triggered loss of long-range order in solids with bonding energy hierarchy. Nature Chem. 3, 311–316 (2011).
Lankhorst, M., Ketelaars, B. & Wolters, R. Low-cost and nanoscale non-volatile memory concept for future silicon chips. Nature Mater. 4, 347–352 (2005).
Shportko, K., Kremers, S., Woda, M., Lencer, D., Robertson, J. & Wuttig, M. Resonant bonding in crystalline phase-change materials. Nature Mater. 7, 653–658 (2008).
Huang, B. & Robertson, J. Bonding origin of optical contrast in phase-change memory materials. Phys. Rev. B 81, 081204R (2010).
Pirovano, A., Lacaita, A. L., Benvenuti, A., Pellizzer, F., Hudgens, S. & Bez, R. Scaling analysis of phase-change memory technology. IEDM Technical Digest 29.6.1–29.6.4 (2003).
Simpson, R. E. et al. Toward the ultimate limit of phase change in Ge2Sb2Te5 . Nano. Lett. 10, 414–419 (2010).
Burr, G. W. et al. Phase change memory technology. J. Vac. Sci. Technol. B 28, 223–262 (2010).
Kolobov, A., Fons, P., Frenkel, A., Ankudinov, A., Tominaga, J., and Uruga, T. Understanding the phase-change mechanism of rewritable optical media. Nature Mater. 3, 703–708 (2004).
Tominaga, J., Simpson, R., Fons, P. & Kolobov, A. Phase change meta-material and device characteristics. Proc. Europ. Symp. Phase Change and Ovonic Science, 54–59 (2010).
Yamada, N., Ohno, E., Nishiuchi, K., Akahira, N. & Takao, M. Rapid phase-transitions of GeTe–Sb2Te3 pseudobinary amorphous thin-films for an optical disk memory. J. Appl. Phys. 69, 2849–2856 (1991).
Chong, T. C. et al. Crystalline amorphous semiconductor superlattice. Phys. Rev. Lett. 100, 136101 (2008).
Krbal, M. et al. Intrinsic complexity of the melt-quenched amorphous Ge2Sb2Te5 memory alloy. Phys. Rev. B 83, 054203 (2011).
Akola, J. et al. Experimentally constrained density-functional calculations of the amorphous structure of the prototypical phase-change material Ge2Sb2Te5 . Phys. Rev. B 80, 020201 (2009).
Simpson, R., Fons, P., Wang, X., Kolobov, A. V., Fukaya, T. & Tominaga, J. Nonmelting super-resolution near-field apertures in Sb–Te alloys. Appl. Phys. Lett. 97, 161906 (2010).
Kwon, M-H. et al. Nanometer-scale order in amorphous Ge2Sb2Te5 analyzed by fluctuation electron microscopy. Appl. Phys. Lett. 90, 021923 (2007).
Lee, B-S. et al. Observation of the role of subcritical nuclei in crystallization of a glassy solid. Science 326, 980–984 (2009).
Hegedüs, J. & Elliott, S. Microscopic origin of the fast crystallization ability of Ge–Sb–Te phase-change memory materials. Nature Mater. 7, 399–405 (2008).
Akola, J. & Jones, R. Binary alloys of Ge and Te: order, voids, and the eutectic composition. Phys. Rev. Lett. 100, 205502 (2008).
Hegedus, J. & Elliott, S. R. Computer-simulation design of new phase-change memory materials. Phys. Status Solidi A 207, 510–515 (2010).
Weidenhof, V., Friedrich, I., Ziegler, S. & Wuttig, M. Laser induced crystallization of amorphous GeSbTe films. J. Appl. Phys. 89, 3168–3176 (2001).
Chen, G. Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices. Phys. Rev. B 57, 14958–14973 (1998).
Taketoshi, N., Baba, T. & Ono, A. Development of a thermal diffusivity measurement system for metal thin films using a picosecond thermoreflectance technique. Meas. Sci. Technol. 12, 2064–2073 (2001).
Chong, T. et al. Phase change random access memory cell with superlattice-like structure. Appl. Phys. Lett. 88, 122114 (2006).
Lai, S. & Lowrey, T. OUM – a 180 nm nonvolatile memory cell element technology for stand alone and embedded application. IEDM Technical Digest 36.5.1–36.5.4 (2001).
Chen, K-N. & Krusin-Elbaum, L. The fabrication of a programmable via using phase-change material in CMOS-compatible technology. Nanotechnology 21, 134001 (2010).
Kim, C. et al. Direct evidence of phase separation in Ge2Sb2Te5 in phase change memory devices. Appl. Phys. Lett. 94, 193504 (2009).
Yang, T-Y., Park, I-M., Kim, B-J. & Joo, Y-C. Atomic migration in molten and crystalline Ge2Sb2Te5 under high electric field. Appl. Phys. Lett. 95, 032104 (2009).
Poborchii, V. V., Kolobov, A. V., & Tanaka, K. Photomelting of selenium at low temperature. Appl. Phys. Lett. 74, 215–217 (1999).
Frumar, M., Firth, A. & Owen, A. Optically induced crystal-to-amorphous-state transition in As2S3 . J. Non-Cryst. Solids 192, 447–450 (1995).
Elliott, S. & Kolobov, A. Athermal light-induced vitrification of As50Se50 films. J. Non-Cryst. Solids 128, 216–220 (1991).
Málek, J. The applicability of Johnson–Mehl–Avrami model in the thermal analysis of the crystallization kinetics of glasses. Thermochim. Acta. 267, 61–73 (1995).
Acknowledgements
This work was supported by the New Energy and Industrial Technology Development Organization project ‘Research and development of nanoelectronic device technology’. The authors thank Elpida Memory Inc. for device measurement discussions, R. Kondo for technical assistance and S. Cook for reading the manuscript. R.E.S. and M.K. would like to thank the Japanese Society for the Promotion of Science for their research fellowships. All work presented here was performed under the auspices of the Center for Applied Near-Field Optics Research (CAN-FOR).
Author information
Authors and Affiliations
Contributions
J.T. conceived and designed the entropy controlled interfacial phase-change memory structures. J.T., R.E.S. and T.Y. performed the experiments. R.E.S. wrote the paper. All authors analysed the results and contributed to the discussion presented in the manuscript.
Corresponding authors
Ethics declarations
Competing interests
The authors declare no competing financial interests.
Supplementary information
Supplementary information
Supplementary information (PDF 1079 kb)
Rights and permissions
About this article
Cite this article
Simpson, R., Fons, P., Kolobov, A. et al. Interfacial phase-change memory. Nature Nanotech 6, 501–505 (2011). https://doi.org/10.1038/nnano.2011.96
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/nnano.2011.96
This article is cited by
-
Novel nanocomposite-superlattices for low energy and high stability nanoscale phase-change memory
Nature Communications (2024)
-
All-optical seeding of a light-induced phase transition with correlated disorder
Nature Physics (2024)
-
Reversible non-volatile electronic switching in a near-room-temperature van der Waals ferromagnet
Nature Communications (2024)
-
Performance improvement of a tunnel junction memristor with amorphous insulator film
Discover Nano (2023)
-
Tunable parity-time symmetry vortex laser from a phase change material-based microcavity
Microsystems & Nanoengineering (2023)