Nanostructured devices have the potential to serve as the basis for next-generation energy systems that make use of densely packed interfaces and thin films1. One approach to making such devices is to build multilayer structures of large area inside the open volume of a nanostructured template. Here, we report the use of atomic layer deposition to fabricate arrays of metal–insulator–metal nanocapacitors in anodic aluminium oxide nanopores. These highly regular arrays have a capacitance per unit planar area of ∼10 µF cm−2 for 1-µm-thick anodic aluminium oxide and ∼100 µF cm−2 for 10-µm-thick anodic aluminium oxide, significantly exceeding previously reported values for metal–insulator–metal capacitors in porous templates2,3,4,5,6. It should be possible to scale devices fabricated with this approach to make viable energy storage systems that provide both high energy density and high power density.
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This work was partially supported by the Laboratory for Physical Sciences and by the UMD-NSF-MRSEC under grant no. DMR 05-20471. The authors would like to thank E. Smela for providing facilities for anodic bonding of aluminium on glass, W.-A. Chiou for helpful discussions, the NanoCenter and the NISP Lab at the University of Maryland for materials processing and characterization, and MKS Instruments and Inficon Inc. for continued support of research activities in the laboratory.
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Banerjee, P., Perez, I., Henn-Lecordier, L. et al. Nanotubular metal–insulator–metal capacitor arrays for energy storage. Nature Nanotech 4, 292–296 (2009). https://doi.org/10.1038/nnano.2009.37
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