Electron interferometry can be used to measure strain with nanoscale resolution in electronic devices by exploiting a simple idea found in physics textbooks.
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Ourmazd, A. The strain of it all. Nature Nanotech 3, 381–382 (2008). https://doi.org/10.1038/nnano.2008.195
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DOI: https://doi.org/10.1038/nnano.2008.195