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Silicon nanodevices

Spotting the atoms

Nature Nanotechnology (21 September 2007) | Download Citation

Atom probe tomography allows researchers to identify the tiny defects in crystal lattices that could affect the performance of silicon nanodevices

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References

  1. 1.

    & Imaging of arsenic Cottrell atmospheres around silicon defects by three-dimensional atom probe tomography. Science 317, 1370–1374 (2007).

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Publication history

Published

DOI

https://doi.org/10.1038/nnano.2007.335

Authors

  1. Search for Tim Reid in:

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