Parallel patterning of nanoparticles via electrodynamic focusing of charged aerosols

Abstract

The development of nanodevices that exploit the unique properties of nanoparticles1,2 will require high-speed methods for patterning surfaces with nanoparticles over large areas and with high resolution3,4,5,6. Moreover, the technique will need to work with both conducting and non-conducting surfaces. Here we report an ion-induced parallel-focusing approach that satisfies all requirements. Charged monodisperse aerosol nanoparticles are deposited onto a surface patterned with a photoresist while ions of the same polarity are introduced into the deposition chamber in the presence of an applied electric field. The ions accumulate on the photoresist, modifying the applied field to produce nanoscopic electrostatic lenses that focus the nanoparticles onto the exposed parts of the surface. We have demonstrated that the technique could produce high-resolution patterns at high speed on both conducting (p-type silicon) and non-conducting (silica) surfaces. Moreover, the feature sizes in the nanoparticle patterns were significantly smaller than those in the original photoresist pattern.

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Figure 1: Experimental set-up and scheme for ion-induced parallel-focusing of nanoparticles.
Figure 2: Particle patterning with ion injection.
Figure 3: Control of focusing with an increase of N2 ion flow rate on a substrate with 230-nm-wide and 135-nm-thick PR patterns.
Figure 4: Various focused nanoparticle patterns on a silica surface of 20-nm thickness on a p-type Si wafer.

References

  1. 1

    Klimov, V. I. et al. Optical gain and stimulated emission in nanocrystal quantum dots. Science 290, 314–317 (2000).

  2. 2

    Kruis, F. E., Fissan, H. & Peled, A. Synthesis of nanoparticles in the gas phase for electronic, optical and magnetic applications—a review. J. Aerosol Sci. 29, 511–535 (1998).

  3. 3

    Jacobs, H. O. & Whitesides, G. M. Submicrometer patterning of charge in thin-film electrets. Science 291, 1763–1766 (2001).

  4. 4

    Warner, M. G. & Hutchison, J. E. Linear assemblies of nanoparticles electrostatically organized on DNA scaffolds. Nature Mater. 2, 272–277 (2003).

  5. 5

    Hamann, H. F., Woods, S. I. & Sun, S. Direct thermal patterning of self-assembled nanoparticles. Nano Lett. 3, 1643–1645 (2003).

  6. 6

    Bullen, D., Chung, S.-W., Wang, X., Zou, J., Mirkin, C. A. & Liu, C. Parallel dip-pen nanolithography with arrays of individually addressable cantilevers. Appl. Phys. Lett. 84, 789–791 (2004).

  7. 7

    Peng, X. et al. Shape control of CdSe nanocrystals. Nature 404, 59–61 (2000).

  8. 8

    Lee, D., Yang, S. & Choi, M. Controlled formation of nanoparticles utilizing laser irradiation in a flame and their characteristics. Appl. Phys. Lett. 79, 2459–2461 (2001).

  9. 9

    Madler, L., Kammler, H. K., Mueller, R. & Pratsinis, S. E. Controlled systhesis of nanostructured particles by flame spray pyrolysis. J. Aerosol Sci. 33, 369–389 (2002).

  10. 10

    Prost, W. et al. Monodisperse aerosol particle deposition: prospects for nanoelectronics. Microelectron. Eng. 41–42, 535–538 (1998).

  11. 11

    Otten, F. et al. Lithographic tools for producing patterned films composed of gas phase generated nanocrystals. Mater. Sci. Technol. 18, 717–720 (2002).

  12. 12

    Krinke, T. J. et al. Positioning of nanometer-sized particles on flat surfaces by direct deposition from the gas phase. Appl. Phys. Lett. 78, 3708–3710 (2001).

  13. 13

    Jacobs, H. O., Campbell, S. A. & Steward, M. G. Approaching nanoxerography: the use of electrostatic forces to position nanoparticles with 100 nm scale resolution. Adv. Mater. 14, 1553–1557 (2002).

  14. 14

    Krinke, T. J., Deppert, K., Magnusson, M. H. & Fissan, H. Nanostructured deposition of nanoparticles from the gas phase. Part. Part. Syst. Charact. 19, 321–326 (2002).

  15. 15

    Kang, M. et al. Nanoparticle pattern deposition from gas phase onto charged flat surface. Microelectron. Eng. 71, 229–236 (2004).

  16. 16

    Jayasinghe, S. N., Edirisinghe, M. J. & Wang, D. Z. Controlled deposition of nanoparticle clusters by electrohydrodynamic atomization. Nanotechnology 15, 1519–1523 (2004).

  17. 17

    Wolf, H. & Birringer, R. Pattern formation in an array of magnetic nanoscale rods mimics magnetic-dipole interaction-driven spinodal decomposition. J. Appl. Phys. 98, 074303 (2004).

  18. 18

    Tao, A. et al. Langmuir–Blodgett silver nanowire monolayers for molecular sensing using surface-enhanced Raman spectroscopy. Nano Lett. 3, 1229–1233 (2003).

  19. 19

    Hayward, R. C., Saville, D. A. & Aksay, I. A. Electrophoretic assembly of colloidal crystals with optically tunable micropatterns. Nature 404, 56–59 (2000).

  20. 20

    Ristenpart, W. D., Aksay, I. A. & Saville, D. A. Electrically guided assembly of planar superlattices in binary colloidal suspensions. Phys. Rev. Lett. 90, 128303 (2003).

  21. 21

    Fudouzi, H., Kobayashi, M. & Shinya, N. Site-controlled deposition of microsized particles using an electrostatic assembly. Adv. Mater. 14, 1649–1652 (2002).

  22. 22

    Lin, Y. et al. Self-directed self-assembly of nanoparticle/copolymer mixtures. Nature 434, 55–59 (2005).

  23. 23

    Lin, Y., Skaff, H., Emrick, T., Dinsmore, A. D. & Russell, T. P. Nanoparticle assembly and transport at liquid–liquid interfaces. Science 299, 226–229 (2003).

  24. 24

    DiFonzo, F. et al. Focused nanoparticle-beam deposition of patterned microstructures. Appl. Phy. Lett. 77, 910–912 (2000).

  25. 25

    Piseri, P., Tafreshi, H. V. & Milani, P. Manipulation of nanoparticles in supersonic beams for the production of nanostructured materials. Curr. Opin. Solid State Mater. Sci. 8, 195–202 (2004).

  26. 26

    Liu, P., Ziemann, P. J., Kittelson, D. B. & McMurry, P. H. Generating particle beams of controlled dimensions and divergence: I. Theory of particle motion in aerodynamic lenses and nozzle expansions. Aerosol Sci. Technol. 22, 293–313 (1995).

  27. 27

    Hinds, W. C. Aerosol Technology: Properties, Behavior, and Measurement of Airborne Particles 2nd edn, 323–338 (Wiley Interscience, New York, 1999).

  28. 28

    Suh, J., Han, B., Okuyama, K. & Choi, M. Highly charging of nanoparticles through electrospray of nanoparticle suspension. J. Colloid Interface Sci. 287, 135–140 (2005).

  29. 29

    Chen, D. R. et al. Design and evaluation of a nanometer aerosol differential mobility analyzer (nano-DMA). J. Aerosol Sci. 29, 497–509 (1998).

  30. 30

    Chou, S. Y., Krauss, P. R. & Renstrom, P. J. Imprint lithography with 25-nanometer resolution. Science 272, 85–87 (1996).

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Acknowledgements

This work was funded by Creative Research Initiatives program sponsored by Korea Ministry of Science and Technology. We thank H.C. Lee, S. B. Yoo and K. Jun for assistance. KFM measurements were carried out by K. S. Yoon at Psia.

Author information

H.K., J.K. and M.C. conceived and designed the experiments; H.K., J.K., H.Y., J.S., T.K., B.H., S.K. and D.S.K. performed the experiments; H.K., P.V.P. and M.C. analysed the data. H.K. and J.K. contributed equally to the paper. M.C. and P.V.P. co-wrote the paper.

Correspondence to Mansoo Choi.

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The authors declare no competing financial interests.

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Supplementary Information

Supplementary methods and figures 1-9 (PDF 3601 kb)

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Kim, H., Kim, J., Yang, H. et al. Parallel patterning of nanoparticles via electrodynamic focusing of charged aerosols. Nature Nanotech 1, 117–121 (2006). https://doi.org/10.1038/nnano.2006.94

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