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Second-harmonic generation in silicon waveguides strained by silicon nitride

Nature Materials volume 11, pages 148–154 (2012)Cite this article

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Abstract

Silicon photonics meets the electronics requirement of increased speed and bandwidth with on-chip optical networks. All-optical data management requires nonlinear silicon photonics. In silicon only third-order optical nonlinearities are present owing to its crystalline inversion symmetry. Introducing a second-order nonlinearity into silicon photonics by proper material engineering would be highly desirable. It would enable devices for wideband wavelength conversion operating at relatively low optical powers. Here we show that a sizeable second-order nonlinearity at optical wavelengths is induced in a silicon waveguide by using a stressing silicon nitride overlayer. We carried out second-harmonic-generation experiments and first-principle calculations, which both yield large values of strain-induced bulk second-order nonlinear susceptibility, up to 40 pm V−1 at 2,300 nm. We envisage that nonlinear strained silicon could provide a competing platform for a new class of integrated light sources spanning the near- to mid-infrared spectrum from 1.2 to 10 μm.

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Figure 1: First-principle calculations of strained Si second-order nonlinearity.
Figure 2: Strained Si waveguides used to measure SHG.
Figure 3: Summary of the results of micro-Raman measurements on the waveguide facet.
Figure 4: Strain profiles (ɛY Y) for the different waveguide types.
Figure 5: Summary of the SHG measurements.

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References

  1. Sutherland, R. L. Handbook of Nonlinear Optics 2nd edn (CRC Press, 2003).

    Book  Google Scholar 

  2. Pavesi, L. & Lockwood, D. Silicon Photonics I (Topics in Applied Physics Vol. 94, Springer, 2004).

    Google Scholar 

  3. Lockwood, D. & Pavesi, L. Silicon Photonics II (Topics in Applied Physics Vol. 119, Springer, 2011).

    Book  Google Scholar 

  4. Lin, Q., Painter, O. J. & Agrawal, G. P. Nonlinear optical phenomena in silicon waveguides: Modeling and applications. Opt. Express 25, 16604–16644 (2007).

    Article  Google Scholar 

  5. Leuthold, J., Koos, C. & Freude, W. Nonlinear silicon photonics. Nature Photon. 4, 535–544 (2010).

    Article  CAS  Google Scholar 

  6. Guidotti, D. & Driscoll, T. A. Second-harmonic generation in centro-symmetric semiconductors. Nuovo Cimento. 8D, 385–416 (1986).

    Article  CAS  Google Scholar 

  7. Huang, J. Y. Probing inhomogeneous lattice deformation at interface of Si(111)/SiO2 by optical second-harmonic reflection and Raman spectroscopy. Jpn. J. Appl. Phys. 33, 3878–3886 (1994).

    Article  CAS  Google Scholar 

  8. Govorkov, S. V. et al. Inhomogeneous deformation of silicon surface layers probed by second-harmonic generation in reflection. J. Opt. Soc. Am. B 6, 1117–1124 (1989).

    Article  CAS  Google Scholar 

  9. Zhao, Ji-H. et al. Enhancement of second-harmonic generation from silicon stripes under external cylindrical strain. Opt. Lett. 34, 3340–3342 (2009).

    Article  CAS  Google Scholar 

  10. Schriever, C., Bohley, C. & Wehrspohn, R. B. Strain dependence of second-harmonic generation in silicon. Opt. Lett. 35, 273–275 (2010).

    Article  CAS  Google Scholar 

  11. Mitchell, S. A., Mehendale, M., Villeneuve, D. M. & Boukherroub, R. Second harmonic generation spectroscopy of chemically modified Si(111) surfaces. Surf. Sci. 488, 367–378 (2001).

    Article  CAS  Google Scholar 

  12. Galli, M. et al. Low-power continuous-wave generation of visible harmonics in silicon photonic crystal nanocavities. Opt. Express 18, 26613–26624 (2010).

    Article  CAS  Google Scholar 

  13. Jacobsen, R. S. et al. Strained silicon as a new electro-optic material. Nature 441, 199–202 (2006).

    Article  CAS  Google Scholar 

  14. Chmielak, B. et al. Pockels effect based fully integrated, strained silicon electro-optic modulator. Opt. Express 19, 17212–17219 (2011).

    Article  CAS  Google Scholar 

  15. Hon, N. K., Tsia, K. K., Solli, D. R., Jalali, B. & Khurgin, J. B. Stress-induced χ(2) in silicon—comparison between theoretical and experimental values. Proc. 6th IEEE Int. Conf. Group IV Photonics 232–234 (2009).

  16. Luppi, E., Hübener, H. & Véniard, V. Ab-initio second-order nonlinear optics in solids. J. Chem. Phys. 132, 241104 (2010).

    Article  Google Scholar 

  17. Luppi, E., Hübener, H. & Véniard, V. Ab-initio second-order nonlinear optics in solids: Second-harmonic generation spectroscopy from time-dependent density-functional theory. Phys. Rev. B 82, 235201 (2010).

    Article  Google Scholar 

  18. Hübener, H., Luppi, E. & Véniard, V. Ab initio calculation of many-body effects on the second-harmonic generation spectra of hexagonal SiC polytypes. Phys. Rev. B 83, 115205 (2011).

    Article  Google Scholar 

  19. Mejia, J. E. et al. Surface second-harmonic generation from Si(111)(1×1)H: Theory versus experiment. Phys. Rev. B 66, 195329 (2002).

    Article  Google Scholar 

  20. De Wolf, I., Maes, H. E. & Jones, S. K. Stress measurements in silicon devices through Raman spectroscopy: Bridging the gap between theory and experiment. J. Appl. Phys. 79, 7148–7156 (1996).

    Article  CAS  Google Scholar 

  21. Fejer, M. M., Magel, G. A., Jundt, D. H. & Byer, R. L. Quasi-phase matched second harmonic generation—tuning and tolerances. IEEE J. Quantum Electron. 28, 2631–2654 (1992).

    Article  Google Scholar 

  22. Liu, X., Qian, L. J. & Wise, F. W. Generation of optical spatiotemporal solitons. Phys. Rev. Lett. 82, 4631–4634 (1999).

    Article  CAS  Google Scholar 

  23. Levy, J. S., Foster, M. A., Gaeta, A. L. & Lipson, M. Harmonic generation in silicon nitride ring resonators. Opt. Express 19, 11415–11421 (2011).

    Article  CAS  Google Scholar 

  24. Hon, N. K., Tsia, K. K., Solli, D. R & Jalali, B. Periodically poled silicon. Appl. Phys. Lett. 94, 091116 (2009).

    Article  Google Scholar 

  25. Gonze, X. et al. ABINIT: First-principles approach to material and nanosystem properties. Comput. Phys. Commun. 180, 2582–2615 (2009).

    Article  CAS  Google Scholar 

  26. Gonze, X. et al. A brief introduction to the ABINIT software package. Z. Kristallogr. 220, 558–562 (2005).

    CAS  Google Scholar 

  27. Godby, R. W., Schluter, M. & Sham, L. J. Self-energy operators and exchange–correlation potentials in semiconductors. Phys. Rev. B 37, 10159–10175 (1988).

    Article  CAS  Google Scholar 

  28. Bianco, F. et al. To be published.

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Acknowledgements

We acknowledge discussions and experimental help by P. Bettotti, A. Pitanti, B. Dierre, F. Enrichi, K. Fedus and A. Yeremian. This work was supported by the FU-PAT (Provincia Autonoma di Trento) project NAOMI, by a grant from Fondazione Cariplo no 2009-2730 and by Fondazione Cassa di Risparmio di Modena through the project ‘Progettazione di materiali nanostrutturati semiconduttori per la fotonica, l’energia rinnovabile e l’ambiente’. We also acknowledge the supercomputing facility CINECA for granted central processing unit time.

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Authors and Affiliations

  1. Department of Physics, Nanoscience Laboratory, University of Trento, via Sommarive 14, 38123 Povo, Trento, Italy

    M. Cazzanelli, F. Bianco, E. Borga & L. Pavesi

  2. Advanced Photonics & Photovoltaics Unit, Bruno Kessler Foundation, via Sommarive 18, 38123 Povo, Trento, Italy

    G. Pucker & M. Ghulinyan

  3. Istituto di Nanoscienze-CNR-S3 and Dipartimento di Scienze e Metodi dell’Ingegneria, Università di Modena e Reggio Emilia, via Amendola 2 Pad. Morselli, I-42122 Reggio Emilia, Italy

    E. Degoli & S. Ossicini

  4. Department of Chemistry, University of California Berkeley, California 94720, USA

    E. Luppi

  5. Laboratoire des Solides Irradiés, Ecole Polytechnique, Route de Saclay, F-91128 Palaiseau and European Theoretical Spectroscopy Facility (ETSF), France

    V. Véniard

  6. Department of Information Engineering, University of Brescia, via Branze 38, 25123 Brescia, Italy

    D. Modotto & S. Wabnitz

  7. CIVEN, via delle Industrie 5, I-30175, Venezia Marghera, Italy

    R. Pierobon

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  1. M. Cazzanelli
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Contributions

M.C. and L.P. conceived the experiments. E.B., F.B. and M.C. made the nonlinear optical measurements. M.G. and G.P. fabricated the waveguides. E.D., E.L., V.V. and S.O. carried out the ab initio simulations. D.M. and S.W. did the nonlinear propagation modelling. R.P. and F.B. made the micro-Raman measurements. L.P. wrote the manuscript in collaboration with all the authors.

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Correspondence to L. Pavesi.

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The authors declare no competing financial interests.

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Cazzanelli, M., Bianco, F., Borga, E. et al. Second-harmonic generation in silicon waveguides strained by silicon nitride. Nature Mater 11, 148–154 (2012). https://doi.org/10.1038/nmat3200

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