Abstract
Metamaterials are artificial materials that—unlike natural substances—enable magnetism to be achieved at optical frequencies1,2,3. The vast majority of photonic metamaterials4,5 has been fabricated by electron-beam lithography and evaporation of metal films, both of which are well-established two-dimensional (2D) technologies. Although stacking of three6 or four7 functional layers made using these methods has been reported, a truly 3D fabrication approach would be preferable for 3D photonic metamaterials. Here, we report first steps in this direction by using a combination of direct laser writing8,9 and silver chemical vapour deposition10,11—the 3D analogues of electron-beam lithography and evaporation, respectively. The optical characterization of a planar test structure composed of elongated split-ring resonators is in good agreement with theory. Retrieval of the effective optical parameters reveals the importance of bi-anisotropy. Once suitable theoretical blueprints are available, our fabrication approach will enable rapid prototyping of truly 3D photonic metamaterials.
This is a preview of subscription content, access via your institution
Access options
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Buy this article
- Purchase on Springer Link
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
References
Pendry, J. B., Holden, A. J., Robbins, D. J. & Stewart, W. J. Magnetism from conductors and enhanced nonlinear phenomena. IEEE Trans. Microw. Theory Tech. 47, 2075–2084 (1999).
Linden, S. et al. Magnetic response of metamaterials at 100 Terahertz. Science 306, 1351–1353 (2004).
Cai, W. et al. Metamagnetics with rainbow colors. Opt. Express 15, 3333–3341 (2007).
Shalaev, V. M. Optical negative-index metamaterials. Nature Photon. 1, 41–48 (2007).
Soukoulis, C. M., Linden, S. & Wegener, M. Negative refractive index at optical wavelengths. Science 315, 47–49 (2007).
Dolling, G., Wegener, M. & Linden, S. Realization of a three-functional-layer negative-index photonic metamaterial. Opt. Lett. 32, 551–553 (2007).
Liu, N. et al. Three-dimensional photonic metamaterials at optical frequencies. Nature Mater. 7, 31–37 (2008).
Kawata, S., Sun, H.-B., Tanaka, T. & Takada, K. Finer features for functional microdevices. Nature 412, 697–698 (2001).
Deubel, M. et al. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nature Mater. 3, 444–447 (2004).
Hampden-Smith, M. J. & Kodas, T. T. Chemical vapor deposition of metals: Part 1. An overview of CVD processes. Chem. Vap. Deposition 1, 8–23 (1995).
Eisenbraun, E. T., Klaver, A., Patel, Z., Nuesca, G. & Kaloyeros, A. E. Low temperature metalorganic chemical vapor deposition of conformal silver coatings for applications in high aspect ratio structures. J. Vac. Sci. Technol. B 19, 585–588 (2001).
Pendry, J. B. Negative refraction makes a perfect lens. Phys. Rev. Lett. 85, 3966–3969 (2000).
Pendry, J. B., Schurig, D. & Smith, D. R. Controlling electromagnetic fields. Science 312, 1780–1782 (2006).
Schurig, D. et al. Metamaterial electromagnetic cloak at microwave frequencies. Science 314, 977–980 (2006).
Leonhardt, U. & Philbin, T. G. Quantum levitation by left-handed metamaterials. New J. Phys. 9, 254:1–11 (2007).
Busch, K. et al. Periodic nanostructures for photonics. Phys. Rep. 444, 101–202 (2007).
Johnson, P. B. & Christy, R. W. Optical constants of the noble metals. Phys. Rev. B 6, 4370–4379 (1972).
Formanek, F. et al. Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization. Opt. Express 14, 800–809 (2006).
<http://www.nanoscribe.de>.
Schröter, U. & Heitmann, D. Grating couplers for surface plasmons excited on thin metal films in the Kretschmann–Raether configuration. Phys. Rev. B 60, 4992–4999 (1999).
Zhang, S. et al. Midinfrared resonant magnetic nanostructures exhibiting a negative permeability. Phys. Rev. Lett. 94, 037402 (2005).
Schweizer, H. et al. Negative permeability around 630 nm in nanofabricated vertical meander metamaterials. Phys. Status Solidi A 204, 3886–3900 (2007).
Ehrlich, D. J. & Melngailis, J. Fast room-temperature growth of SiO2 films by molecular-layer dosing. Appl. Phys. Lett. 58, 2675–2677 (1991).
Smith, D. R., Schultz, S., Markoš, P. & Soukoulis, C. M. Determination of effective permittivity and permeability of metamaterials from reflection and transmission coefficients. Phys. Rev. B 65, 195104 (2002).
Chen, X., Wu, B.-I., Kong, J. A. & Grzegorczyk, T. M. Retrieval of the effective constitutive parameters of bianisotropic metamaterials. Phys. Rev. E 71, 046610 (2005).
Marqués, R., Medina, F. & Rafii-El-Idrissi, R. Role of bianisotropy in negative permeability and left-handed metamaterials. Phys. Rev. B 65, 144440 (2002).
Bungay, A. R., Svirko, Yu. P. & Zheludev, N. I. Equivalency of the Casimir and the Landau-Lifshitz approaches to continuous-media electrodynamics and optical activity on reflection. Phys. Rev. B 47, 11730–11735 (1993).
Smith, D. R., Pendry, J. B. & Wiltshire, M. C. K. Metamaterials and negative refractive index. Science 305, 788–792 (2004).
Acknowledgements
We thank C. M. Soukoulis for stimulating discussions. We acknowledge financial support provided by the Deutsche Forschungsgemeinschaft (DFG) and the State of Baden-Württemberg through the DFG-Center for Functional Nanostructures (CFN) within subprojects A1.4 and A1.5. The project PHOME acknowledges the financial support of the Future and Emerging Technologies (FET) programme within the Seventh Framework Programme for Research of the European Commission, under FET-Open grant number 213390. Also we acknowledge funding by the Bundesministerium für Bildung und Forschung (BMBF). The research of G.v.F. is further supported through a DFG Emmy-Noether fellowship (DFG-Fr 1671/4-3), that of S.L. through a ‘Helmholtz-Hochschul-Nachwuchsgruppe’ (VH-NG-232).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Competing interests
G.v.F., M.T. and M.W. have holdings in Nanoscribe, a company that may have a commercial interest in the results of this research and technology.
Rights and permissions
About this article
Cite this article
Rill, M., Plet, C., Thiel, M. et al. Photonic metamaterials by direct laser writing and silver chemical vapour deposition. Nature Mater 7, 543–546 (2008). https://doi.org/10.1038/nmat2197
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1038/nmat2197
This article is cited by
-
Three-dimensional printing of silica glass with sub-micrometer resolution
Nature Communications (2023)
-
Fabrication of silver helix microstructures in a large area by a two-photon absorption DLW method
Scientific Reports (2021)
-
Diamond step-index nanowaveguide to structure light efficiently in near and deep ultraviolet regimes
Scientific Reports (2020)
-
Mantle cloaking due to ideal magnetic dipole scattering
Scientific Reports (2020)
-
Dynamic-Shift Single- and Double-Negative Refractive Index in a Novel Three-Dimensional Metamaterial
Plasmonics (2019)