News & Views | Published:

Nanofabrication

Best of both worlds

Nature Materials volume 5, pages 853854 (2006) | Download Citation

Subjects

Fabricating nanostructures on a substrate often requires a choice between pattern complexity and narrow wire widths. By combining lithographic patterning with electrochemical templating, complex patterns over large areas with critical dimensions well below 100 nm become possible.

Access optionsAccess options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

References

  1. 1.

    , , , & Nature Mater. 5, 914–919 (2006).

  2. 2.

    & Anal. Chem. 70, 2902–2907 (1998).

  3. 3.

    & Rev. Sci. Instr. 53, 410–412 (1980).

  4. 4.

    , L, & Appl. Phys. Lett. 77, 1991–1993 (2000).

  5. 5.

    , , , & Appl. Phys. Lett. 88, 172501 (2005).

  6. 6.

    et al. Science 300, 112–115 (2003).

  7. 7.

    , & Nature 404, 971–974 (2000).

  8. 8.

    & Appl. Phys. Lett. 77, 3015–3017 (2000).

  9. 9.

    & Chem. Mater. 12, 1195–1204 (2000).

  10. 10.

    et al. Chem. Phys. Lett. 325, 340–344 (2000).

Download references

Author information

Affiliations

  1. Douglas Natelson is in the Department of Physics and Astronomy, Rice University, 6100 Main St., Houston, Texas 77005, USA. natelson@rice.edu

    • Douglas Natelson

Authors

  1. Search for Douglas Natelson in:

About this article

Publication history

Published

DOI

https://doi.org/10.1038/nmat1769

Further reading

Newsletter Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing