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Fast fabrication of long-range ordered porous alumina membranes by hard anodization

Nature Materials volume 5, pages 741–747 (2006)Cite this article

Abstract

Nanoporous anodic aluminium oxide has been widely used for the development of various functional nanostructures. So far these self-organized pore structures could only be prepared within narrow processing conditions. Here we report a new oxalic-acid-based anodization process for long-range ordered alumina membranes. This process is a new generation of the so-called ‘hard anodization’ approach that has been widely used in industry for high-speed fabrication of mechanically robust, very thick (>100 μm) and low-porosity alumina films since the 1960s. This hard anodization approach establishes a new self-ordering regime with interpore distances, (Dint)=200–300 nm, which have not been achieved by mild anodization processes so far. It offers substantial advantages over conventional anodization processes in terms of processing time, allowing 2,500–3,500% faster oxide growth with improved ordering of the nanopores. Perfectly ordered alumina membranes with high aspect ratios (>1,000) of uniform nanopores with periodically modulated diameters have been realized.

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Figure 1: Hard anodization versus mild anodization.
Figure 2: The effect of voltage on the self-ordering of AAO.
Figure 3: A new and second regime of self-ordering for oxalic acid anodization.
Figure 4: Long-range ordered alumina membranes with modulated pore diameters.

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Acknowledgements

We thank F. Müller for helpful discussions, D. Hesse for his comments on the manuscript and W. Gruner at the Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden (IFW-Dresden) for chemical anaysis. We acknowledge financial support from the German Federal Ministry for Education and Research (BMBF, Project No. 03N8701).

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  1. Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120, Halle, Germany

    Woo Lee, Ran Ji, Ulrich Gösele & Kornelius Nielsch

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Correspondence to Woo Lee.

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Lee, W., Ji, R., Gösele, U. et al. Fast fabrication of long-range ordered porous alumina membranes by hard anodization. Nature Mater 5, 741–747 (2006). https://doi.org/10.1038/nmat1717

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