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Lithography

Polymer patterns go square

Nature Chemistry (17 October 2008) | Download Citation

Subjects

The supramolecular assembly and phase separation in diblock copolymers have been exploited to generate nanoscale square patterns for photolithography

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References

  1. 1.

    , , , & Evolution of block copolymer lithography to highly ordered square arrays. Science 10.1126/science.1162950 (2008).

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About this article

Publication history

Published

DOI

https://doi.org/10.1038/nchem.77

Authors

  1. Search for Neil Withers in:

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