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Face-to-face transfer of wafer-scale graphene films


Graphene has attracted worldwide interest since its experimental discovery1,2, but the preparation of large-area, continuous graphene film on SiO2/Si wafers, free from growth-related morphological defects or transfer-induced cracks and folds, remains a formidable challenge3. Growth of graphene by chemical vapour deposition on Cu foils4,5,6,7 has emerged as a powerful technique owing to its compatibility with industrial-scale roll-to-roll technology6. However, the polycrystalline nature and microscopic roughness of Cu foils means that such roll-to-roll transferred films are not devoid of cracks and folds6,7. High-fidelity transfer or direct growth of high-quality graphene films on arbitrary substrates is needed to enable wide-ranging applications in photonics or electronics, which include devices such as optoelectronic modulators, transistors, on-chip biosensors and tunnelling barriers3,8,9. The direct growth of graphene film on an insulating substrate, such as a SiO2/Si wafer, would be useful for this purpose, but current research efforts remain grounded at the proof-of-concept stage, where only discontinuous, nanometre-sized islands can be obtained10. Here we develop a face-to-face transfer method for wafer-scale graphene films that is so far the only known way to accomplish both the growth and transfer steps on one wafer. This spontaneous transfer method relies on nascent gas bubbles and capillary bridges between the graphene film and the underlying substrate during etching of the metal catalyst, which is analogous to the method used by tree frogs to remain attached to submerged leaves11,12. In contrast to the previous wet4,5,13,14,15 or dry6,7 transfer results, the face-to-face transfer does not have to be done by hand and is compatible with any size and shape of substrate; this approach also enjoys the benefit of a much reduced density of transfer defects compared with the conventional transfer method. Most importantly, the direct growth and spontaneous attachment of graphene on the underlying substrate is amenable to batch processing in a semiconductor production line, and thus will speed up the technological application of graphene.

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Figure 1: Illustration of our face-to-face method for transferring graphene mediated by capillary bridges.
Figure 2: Characterization of intercalated water layer with capillary bridges during face-to-face transfer.
Figure 3: AFM images and height profiles of graphene on a SiO2/Si wafer transferred by our face-to-face technique.
Figure 4: Characterization of face-to-face transferred graphene on a SiO2/Si wafer.


  1. Novoselov, K. S. et al. Electric field effect in atomically thin carbon films. Science 306, 666–669 (2004)

    ADS  CAS  Google Scholar 

  2. Novoselov, K. S. et al. Two-dimensional atomic crystals. Proc. Natl Acad. Sci. USA 102, 10451–10453 (2005)

    Article  ADS  CAS  Google Scholar 

  3. Novoselov, K. S. et al. A roadmap for graphene. Nature 490, 192–200 (2012)

    Article  ADS  CAS  Google Scholar 

  4. Li, X. S. et al. Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324, 1312–1314 (2009)

    Article  ADS  CAS  Google Scholar 

  5. Gao, L. B. et al. Efficient growth of high-quality graphene films on Cu foils by ambient pressure chemical vapor deposition. Appl. Phys. Lett. 97, 183109 (2010)

    Article  ADS  Google Scholar 

  6. Bae, S. K. et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nature Nanotechnol. 5, 574–578 (2010)

    Article  ADS  CAS  Google Scholar 

  7. Kang, J. et al. Efficient transfer of large-area graphene films onto rigid substrates by hot pressing. ACS Nano 6, 5360–5365 (2012)

    Article  CAS  Google Scholar 

  8. Yang, H. et al. Graphene barristor, a triode device with a gate-controlled Schottky barrier. Science 336, 1140–1143 (2012)

    Article  ADS  CAS  Google Scholar 

  9. Liu, M. et al. A graphene-based broadband optical modulator. Nature 474, 64–67 (2011)

    Article  ADS  CAS  Google Scholar 

  10. Chen, J. Y. et al. Oxygen-aided synthesis of polycrystalline graphene on silicon dioxide substrates. J. Am. Chem. Soc. 133, 17548–17551 (2011)

    Article  CAS  Google Scholar 

  11. Federle, W., Barnes, W. J. P., Baumgartner, W., Drechsler, P. & Smith, J. M. Wet but not slippery: boundary friction in tree frog adhesive toe pads. J. R. Soc. Interface 3, 689–697 (2006)

    Article  CAS  Google Scholar 

  12. Persson, B. N. J. Wet adhesion with application to tree frog adhesive toe pads and tires. J. Phys. Condens. Matter 19, 376110 (2007)

    Article  Google Scholar 

  13. Reina, A. et al. Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett. 9, 30–35 (2009)

    Article  ADS  CAS  Google Scholar 

  14. Kim, K. S. et al. Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457, 706–710 (2009)

    Article  ADS  CAS  Google Scholar 

  15. Gao, L. B. et al. Repeated growth and bubbling transfer of graphene with millimetre-size single-crystal grains using platinum. Nature Commun. 3, 699 (2012)

    Article  ADS  Google Scholar 

  16. Li, X. S. et al. Large-area graphene single crystals grown by low-pressure chemical vapor deposition of methane on copper. J. Am. Chem. Soc. 133, 2816–2819 (2011)

    Article  CAS  Google Scholar 

  17. Sun, Z. Z. et al. Growth of graphene from solid carbon sources. Nature 468, 549–552 (2010)

    Article  ADS  CAS  Google Scholar 

  18. Levendorf, M. P. et al. Graphene and boron nitride lateral heterostructures for atomically thin circuitry. Nature 488, 627–632 (2012)

    Article  ADS  CAS  Google Scholar 

  19. Rafiee, J. et al. Wetting transparency of graphene. Nature Mater. 11, 217–222 (2012)

    Article  ADS  CAS  Google Scholar 

  20. Bunch, J. S. et al. Impermeable atomic membranes from graphene sheets. Nano Lett. 8, 2458–2462 (2008)

    Article  ADS  CAS  Google Scholar 

  21. Kobayashi, H., Mizokuro, T., Nakato, Y., Yoneda, K. & Todokoro, Y. Nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact. Appl. Phys. Lett. 71, 1978–1980 (1997)

    Article  ADS  CAS  Google Scholar 

  22. Gao, L. B., Ren, W. C., Li, F. & Cheng, H. M. Total color difference for rapid and accurate identification of graphene. ACS Nano 2, 1625–1633 (2008)

    Article  CAS  Google Scholar 

  23. Janos, S. Colorimetry: Understanding the CIE System 25–88 (Wiley, 2007)

    Google Scholar 

  24. Greenwood, J. A. & Williamson, J. B. P. Contact of nominally flat surfaces. Proc. R. Soc. Lond. A 295, 300–319 (1966)

    Article  ADS  CAS  Google Scholar 

  25. Persson, B. N. J. Capillary adhesion between elastic solids with randomly rough surfaces. J. Phys. Condens. Matter 20, 315007 (2008)

    Article  ADS  Google Scholar 

  26. Ferrari, A. C. et al. Raman spectrum of graphene and graphene layers. Phys. Rev. Lett. 97, 187401 (2006)

    Article  ADS  CAS  Google Scholar 

  27. Das, A. et al. Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor. Nature Nanotechnol. 3, 210–215 (2008)

    Article  CAS  Google Scholar 

  28. Gao, L. B. et al. Surface and interference coenhanced Raman scattering of graphene. ACS Nano 3, 933–939 (2009)

    Article  CAS  Google Scholar 

  29. Wei, D. C. et al. Synthesis of N-doped graphene by chemical vapor deposition and its electrical properties. Nano Lett. 9, 1752–1758 (2009)

    Article  ADS  CAS  Google Scholar 

  30. Yoon, T. et al. Direct measurement of adhesion energy of monolayer graphene as-grown on copper and its application to renewable transfer process. Nano Lett. 12, 1448–1452 (2012)

    Article  ADS  CAS  Google Scholar 

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We thank C. T. Nai for help with X-ray photoelectron spectroscopy and B. K. Chong (Agilent Technologies) for the liquid AFM. This work was supported by MOE Tier 2 grant ‘Interface engineering of graphene hybrids for energy conversion’ (R-143-000-488-112) and by NRF-CRP grant ‘Novel 2D materials with tailored properties: beyond graphene’ (R-144-000-295-281).

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Authors and Affiliations



L.G. and K.P.L. designed the experiments, interpreted the data and wrote the manuscript. L.G. performed graphene growth, transfer and calculations. L.G., G.-X.N. and B.L. fabricated the devices. Y.L. performed the X-ray photoelectron spectroscopy measurements. L.G., K.P.L. and A.H.C.N. discussed the data.

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Correspondence to Kian Ping Loh.

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The authors declare no competing financial interests.

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Gao, L., Ni, GX., Liu, Y. et al. Face-to-face transfer of wafer-scale graphene films. Nature 505, 190–194 (2014).

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