Abstract
In the context of materials science, texture describes the statistical distribution of grain orientations. It is an important characteristic of the microstructure of polycrystalline films1,2,3,4,5, determining various electrical, magnetic and mechanical properties. Three types of texture component are usually distinguished in thin films: random texture, when grains have no preferred orientation; fibre texture6,7,8,9,10, for which one crystallographic axis of the film is parallel to the substrate normal, while there is a rotational degree of freedom around the fibre axis; and epitaxial alignment (or in-plane texture) on single-crystal substrates11,12,13,14,15, where an in-plane alignment fixes all three axes of the grain with respect to the substrate. Here we report a fourth type of texture—which we call axiotaxy—identified from complex but symmetrical patterns of lines on diffraction pole figures for thin films formed by solid-state reactions. The texture is characterized by the alignment of planes in the film and substrate that share the same d-spacing. This preferred alignment of planes across the interface manifests itself as a fibre texture lying off-normal to the sample surface, with the fibre axis perpendicular to certain planes in the substrate. This texture forms because it results in an interface, which is periodic in one dimension, preserved independently of interfacial curvature. This new type of preferred orientation may be the dominant type of texture for a wide class of materials and crystal structures.
This is a preview of subscription content, access via your institution
Access options
Subscribe to this journal
Receive 51 print issues and online access
$199.00 per year
only $3.90 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
References
Kocks, U. F., Tome, C. N. & Wenk, H.-R. Texture and Anisotropy: Preferred Orientations in Polycrystals and their Effect on Materials Properties (Cambridge Univ. Press, Cambridge, UK, 1976)
Randle, V. & Engler, O. Introduction to Texture Analysis: Macrotexture, Microtexture and Orientation Mapping (Gordon and Breach Science, Amsterdam, 2000)
Bunge, H. J. Texture Analysis in Materials Science—Mathematical Methods 2nd edn (Butterworths, London, 1982)
Nokinov, V. Grain Growth and Control of Microstructure and Texture in Polycrystalline Materials (CRC, Boca Raton, 1997)
Thompson, C. V. & Carel, R. Texture development in polycrystalline thin films. Mater. Sci. Eng. B 32, 211–219 (1995)
Harper, J. M. E. & Rodbell, K. P. Microstructure control in semiconductor metallization. J. Vac. Sci. Technol. B 15, 763–779 (1997)
Dong, L. & Srolovitz, D. J. Texture development mechanisms in ion beam assisted deposition. J. Appl. Phys. 84, 5261–5269 (1998)
Murray, C. E. & Rodbell, K. P. Texture inheritance in Al(Cu) interconnect materials. J. Appl. Phys. 89, 2337–2342 (2001)
Lucadamo, G., Barmak, K. & Rodbell, K. P. Texture in Ti/Al and Nb/Al multilayer thin films: role of Cu. J. Mater. Res. 16, 1449–1459 (2001)
Schell, N., Matz, W., Bottiger, J., Chevallier, J. & Kringhoj, P. Development of texture in TiN films by use of in situ synchrotron x-ray scattering. J. Appl. Phys. 91, 2037–2044 (2002)
Bulle-Lieuwma, C. W. T., van Ommen, A. H., Hornstra, J. & Aussems, C. N. A. M. Observation and analysis of epitaxial growth of CoSi2 on (100) Si. J. Appl. Phys. 71, 2211–2224 (1992)
Bulle-Lieuwma, C. W. T. Epitaxial growth of CoSi2/Si structures. Appl. Surf. Sci. 68, 1–18 (1993)
Harper, J. M. E., Rodbell, K. P., Colgan, E. G. & Hammond, R. H. Control of in plane texture of body centered cubic metal thin films. J. Appl. Phys. 82, 4319–4326 (1997)
Dong, L., Srolovitz, D. J., Was, G. S., Zhao, Q. & Rollett, A. D. Combined out of plane and in plane texture control in thin films using ion beam assisted deposition. J. Mater. Res. 16, 210–216 (2001)
Özcan, A. S. et al. Texture of TiSi2 thin films on Si(001). J. Appl. Phys. 92, 5011–5018 (2002)
Tsukada, M. & Ohfuji, S. Structural inheritance from polycrystalline underlayers in the growth of double-layered aluminum films. J. Vac. Sci. Technol. B 11, 326–332 (1993)
Tracy, D. P., Knorr, D. B. & Rodbell, K. P. Texture in multilayer metallization structures. J. Appl. Phys. 76, 2671–2680 (1994)
Knorr, D. B., Merchant, S. M. & Biberger, M. A. Development of texture in interconnect thin film stacks. J. Vac. Sci. Technol. B 16, 2734–2744 (1998)
Joint Committee on Powder Diffraction Standards. Powder Diffraction File 38–0844 (International Centre for Diffraction Data, Philadelphia, 1998)
Kilaas, R. Optimal and near-optimal filter in high-resolution electron microscopy. J. Microsc. 190, 45–51 (1998)
Acknowledgements
We thank F. M. d'Heurle, J. M. E. Harper, C. Cabral, K. Ludwig, C. Murray, C. Noyan and K. P. Rodbell for discussions, and C. Diareo for TEM sample preparation. C.D. thanks the ‘Fonds voor Wetenschappelijk Onderzoek—Vlaanderen’ for support. The work at NCEM was supported by the Director, Office of Science, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering, of the US Department of Energy. Pole figures were measured at the NSLS, Brookhaven National Laboratory, which is supported by the US Department of Energy, Division of Materials Sciences and Division of Chemical Sciences.
Author information
Authors and Affiliations
Corresponding authors
Ethics declarations
Competing interests
The authors declare that they have no competing financial interests.
Supplementary information
Rights and permissions
About this article
Cite this article
Detavernier, C., Özcan, A., Jordan-Sweet, J. et al. An off-normal fibre-like texture in thin films on single-crystal substrates. Nature 426, 641–645 (2003). https://doi.org/10.1038/nature02198
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1038/nature02198