Figure 1 | Microsystems & Nanoengineering

Figure 1

From: Heterogeneous 2D/3D photonic integrated microsystems

Figure 1

Schematic illustration of 3D photonic inscription where the waveguide is formed by increasing the local index of the material. The table shows how optical pulse energy, pulse repetition rate, and waveguide scan speed are adjusted to optimize the quality of the inscribed waveguide when the pulse width is held constant. Depending on the combination of laser repetition rate and mechanical scan rate, the material modification regions formed by each pulse will overlap by varying amounts. 3D, three dimensional.

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