Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • NEWS AND VIEWS

All-in-one design integrates microfluidic cooling into electronic chips

Access options

Rent or buy this article

Prices vary by article type

from$1.95

to$39.95

Prices may be subject to local taxes which are calculated during checkout

Nature 585, 188-189 (2020)

doi: https://doi.org/10.1038/d41586-020-02503-1

References

  1. van Erp, R., Soleimanzadeh, R., Nela, L., Kampitsis, G. & Matioli, E. Nature 585, 211–216 (2020).

    Article  Google Scholar 

  2. Bose, B. K. IEEE Ind. Electron. Mag. 3, 7–11 (2009).

    Article  Google Scholar 

  3. Moore, A. L. & Shi, L. Mater. Today 17, 163–174 (2014).

    Article  Google Scholar 

  4. Hansson, J., Nilsson, T. M. J., Ye, L. & Liu, J. Int. Mater. Rev. 63, 22–45 (2018).

    Article  Google Scholar 

  5. Brunschwiler, T. et al. Proc. ITherm 196–203 (2006).

    Article  Google Scholar 

  6. Wang, E. N. et al. J. Microelectromech. Syst. 13, 833–842 (2004).

    Article  Google Scholar 

  7. Acikalin, T. & Schroeder, C. Proc. ITherm 673–679 (2014).

    Article  Google Scholar 

  8. Wei, T. et al. IEEE Int. Electron Devices Meet. 32.5.1–32.5.4 (2017).

    Article  Google Scholar 

  9. Tuckerman, D. B. & Pease, R. F. W. IEEE Electron Device Lett. 2, 126–129 (1981).

    Article  Google Scholar 

  10. Phillips, R. J. Lincoln Lab. J. 1, 31–48 (1988).

    Google Scholar 

  11. Harpole, G. M. & Eninger, J. E. Proc. 7th IEEE Semi-Therm Symp. 59–63 (1991).

  12. Jung, K. W. et al. Proc. ITherm 98–104 (2017).

    Article  Google Scholar 

  13. Pan, J., Toleno, B. J., Chou, T. & Dee, W. J. Solder. Surf. Mount Technol. 18, 48–56 (2006).

    Article  Google Scholar 

Download references

Subjects

Latest on:

Nature Careers

Jobs

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing

Search

Quick links